Nxp B.v.

Joep J M Bontemps

Jozef Thomas Martinus Van Beek

Casper Van Der Avoort

Jan Jacob Koning

A bulk-acoustic-mode MEMS resonator has a first portion with a first physical layout, and a layout modification feature. The resonant frequency is a function of the physical layout, which is designed such that the frequency variation is less than 150 ppm for a variation in edge position of the resonator shape edges of 50 nm. This design combines at least two different layout features in such a way that small edge position variations (resulting from uncontrollable process variation) have negligible effect on the resonant frequency.

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Groningen, Netherlands

Joep J M Bontemps