Fas Medic S.a.

Joel Di Dio

Manuel Diaz

Vincent Tanari

Davide Azzoni

Valve block

A fluid sensing apparatus is provided having a fluid flow channel having a flow restriction. A fluid sensor is in fluid communication with first and second fluid ports, and a laminar flow element. The laminar flow element includes a flow stabilisation rod which defines a fluid sensing portion of the fluid flow channel. The flow restriction comprises a reduction in the hydraulic diameter of the fluid sensing portion of the fluid flow channel which is caused by a decrease in diameter of the fluid flow channel, or by an increase in the diameter of the flow stabilisation rod, or by both a decrease in diameter of the fluid flow channel and an increase in the diameter of the flow stabilisation rod. Also provided is a mass flow controller including such a fluid sensing apparatus.

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Geneva, Switzerland

Joel Di Dio