Fluoroware Systems Corporation

Joel A Elftmann

Robert S Blackwood

A substrate stripping and cleaning apparatus including a closed bowl with an exhaust vent and a liquid drain, a rotating turntable in the bowl carrying baskets of substrates, a spray post with multiple fluid passages, orifices and spray nozzles directing rinsing spray outwardly against the turntable and substrates, rinsing water manifold pipes on the turntable and revolving therewith and having nozzles directing rinsing water to all portions of the inner surfaces of the bowl, the pipes being supplied with water through passages in the drive shaft for the turntable.

Growing community of inventors

Minneapolis, MN, United States of America

Joel A Elftmann