Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Speedfam Corporation (1 from 49 patents)
1 patent:
1. 5834645 - Methods and apparatus for the in-process detection of workpieces with a