Lam Research Corporation

Novellus Systems Incorporated

Joe Laia

Timothy Joseph Franklin

Jason Stephen Corneille

Robert D Tas

Steven Douglas Flanders

Ajay Saproo

Jason R Wright

Nancy E Gilbert

Jim Stimmell

Stephen C Jones

Systems having an in-line microwave heater to heat fluids for processing a substrate are provided. An embodiment of a system includes a microelectronic processing chamber, a reservoir for storing a fluid used to process wafers within the chamber, a supply line for transporting the fluid to the chamber, and a microwave heater arranged along the supply line. The system includes processor executable program instructions for operating the microwave heater at parameters configured to heat fluid within the supply line to a temperature greater than a fluid temperature within the reservoir, such as approximately 20&#xb0; C. greater than the reservoir fluid temperature. It is noted that the inclusion of an in-line microwave heater is not limited to microelectronic fabrication systems, but may be used for any system in which heated fluids are used for processing a substrate, such as but not limited to electroplating or electroless plating systems.

Systems incorporating microwave heaters within fluid supply lines of substrate processing chambers and methods for use of such systems

Dielectric films in integrated circuits are annealed in the presence of water to improve their thermal stability and their resistance to damage from ultraviolet radiation.

Annealing process for low-k dielectric film

Growing community of inventors

Morgan Hill, CA, United States of America

Joe Laia