Ultratech Stepper, Inc.

Joe Gortych

Andrew M Hawryluk

Yu Chue Fong

A radiation shield device ( ) and method, the apparatus comprising either an absorbing shield ( ), a scattering shield ( ) or an absorbing and scattering shield ( ) arranged in a processing tool ( ) that irradiates a workpiece ( ) with high-irradiance radiation ( ) from a light source ( ). The processing tool has a tool portion ( ) having an irradiance damage threshold (I ). The radiation shield device is designed to intercept a portion of the high-irradiance radiation that would otherwise be incident the tool portion, and to ensure that radiation exiting the particular shield comprising the radiation shield device and incident the tool portion has an irradiance below the tool portion irradiance damage threshold. The method includes using the radiation shield device in processing a workpiece using a processing tool.

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Winooski, VT, United States of America

Joe Gortych