Carl-zeiss-smt Ag

Jochen Wietzorrek

Wolfgang Singer

Johannes Wangler

Markus Weiss

Frank Melzer

Wilhelm Egle

Joachim Hainz

There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.

Collector configured of mirror shells

There is provided a collector for illumination systems for light having a wavelength &#x2266;193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.

Collector having unused region for illumination systems using a wavelength &#x2266;193 nm

Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm

Growing community of inventors

Aalen, Germany

Jochen Wietzorrek