Rutgers, the State University of New Jersey

Coherent, Inc.

Technische Universitaet Muenchen

Draegerwerk, Ag

Jochen Wieser

Andreas Ulrich

Daniel Ely Murnick

Werner Kr&ouml;tz

Wolfgang Baether

Werner Krotz

A device for spectroscopy using charged analytes has an electron generator, which sends electrons through membrane into a charging chamber. The thermal strain of the membrane may be lowered significantly if a material is selected for the membrane which contains at least one component from the group of oxides, nitrides, and carbides with at least one of the elements B, Al, C, Si, and Ti or polysilicon.

Device for spectroscopy using charged analytes

Excimers are generated by directing an electron beam at about 5 KeV to about 40 KeV into an excimer forming gas such as He, Ne, Ar, Kr, and Xe or mixtures of these with other gases through a ceramic foil such as SiN,. Vacuum ultraviolet (VUV) light is emitted by the excimers or by other species in contact therewith. The invention can provide intense, continuously operable broadband or monochromatic VUV light sources.

Electron beam irradiation of gases and light source using the same

Excimers are generated by directing an electron beam at about 5 KeV to about 40 KeV into an excimer forming gas such as He, Ne, Ar, Kr, and Xe or mixtures of these with other gases through a ceramic foil such as SiN.sub.x. Vacuum ultraviolet (VUV) light is emitted by the excimers or by other species in contact therewith. The invention can provide intense, continuously operable broadband or monochromatic VUV light sources.

Growing community of inventors

Munich, Germany

Jochen Wieser