Robert Boschgmbh

Jochen Strähle

Ulrich Kallmann

Michael Lindner

Rahmi Gencoglu

Uwe Kasten

An interferometric system having an illumination arm, including a light source and an illuminating optical system, for forming an illuminating beam; an object arm, including a reference element for measuring an object having an object surface to be measured, for forming an image-rays path, the object to be measured having an object surface inaccessible to direct illumination; a reference arm including a reference element; a detector arm including a detector; and a beam splitter, the reference element having one or more mirrored zones. Consequently, component parts which have undercut surfaces in the illumination direction can be measured in a single measuring operation.

Interferometric system having a reference surface including a mirrored zone

An interferometric measuring device for measuring a measured object, in particular for thickness measurement of the measured object. A special-purpose objective having a mirror system is provided, which includes at least one first deflection mirror and one second deflection mirror and in which these are situated in such a way that the object beams incident on the first deflection mirror or on the second deflection mirror are directed respectively onto a first side or a second side, which is parallel thereto, of the measured object to be measured in a first beam path or a second beam path, respectively, which are antiparallel to one another. The mirror system additionally has at least one first position mirror for imaging the position of the measured object to be measured in relation to the first deflection mirror and/or the second deflection mirror.

Interferometer having a mirror system for measuring a measured object

An optical measuring device for measuring a plurality of surfaces of an object to be measured using a system of optical elements. For example, the first surface to be measured can be the inner wall of a narrow guide bore, while the second surface to be measured is formed by a valve-seat section that is conical and positioned at one end of the guide bore. As optical elements of measuring device, at least one beam splitter and one lens system are disposed in such a way that a first portion of the light beams incident on the beam splitter is directed perpendicularly onto the first surface of the object to be measured, and a second portion of the light beams incident on the beam splitter strikes the lens system downstream of the beam splitter and is directed via the lens system perpendicularly onto the second surface.

Optical measuring device for measuring a plurality of surfaces of an object to be measured

An optical measuring device for measuring curved surfaces of a measured object. The curved surface to be measured may at least partially have the internal or external shape of a conical or cylindrical surface or of a saddle surface. The measuring device has a system of optical elements which includes at least one lens system and a first deflection optics. The lens system and the first deflection optics are positioned so that a first part of the light beams incident on the lens system is directed perpendicularly onto the curved surfaces of the measured object via the first deflection optics, while a second part of the light beams incident on the lens system is directed onto a reference object. Simultaneous measurement of locations of the measured object which are difficult to access and a reference object is thus made possible.

Optical measuring device for measuring curved surfaces

An interferometric measuring device for three-dimensional measurement of shapes on an object to be measured having: a beam splitter receiving via an input light path, and splitting into measuring and reference light paths, light from a light source; an image pick-up, to which light reflected from the object and from a reference and brought into interference can be supplied via an output light path for conversion into electrical signals; an evaluation unit for determining the surface shape from the signals; and an adaptation device adapting the light intensity or interfering light signals. For increased measuring precision, the measuring device is configured to measure planar regions of the surface which extend over at least the measuring device's lateral resolution and the adaptation device is configured for adjusting the intensity of the light and/or the signals by locally varying reflective properties of the surface with respect to the measuring optics.

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Weissach, Germany

Jochen Strähle