Singulus Technologies Ag

Jochen Heilingbrunner

Wolfgang Becker

Edgar Rüth

A method and a device for stringing together objects in transport systems, preferably in coating systems, for adjusting the distance between two objects, preferably substrates or substrate holders, being arranged one behind the other, wherein the front object moves at a process speed vin the transport system and the rear object is at an undefined distance from the front object. The method comprises the following steps: (a) accelerating the rear substrate to an initial speed v&#x3e;v; (b) detecting an increase in the driving torque when the rear substrate moves against the front substrate; (c) delaying the rear substrate by a predetermined value in order to establish a predetermined distance afrom the front substrate; and (d) adjusting the speed of the rear substrate to the process speed v.

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Hanau, Germany

Jochen Heilingbrunner