Robert Boschgmbh

Jochen Hahn

Johannes Classen

Andrea Visconti

Thomas Claus

Dominik Geisler

Timo Giesselmann

Artjom Kosov

A micromechanical sensor, including a micromechanical chip having a first micromechanical structure, a first evaluation chip, having a first application-specific integrated circuit, and a second evaluation chip having a second application-specific integrated circuit. The first evaluation chip and the micromechanical chip are situated in a stacked manner, the micromechanical chip being directly electrically conductively connected with the first evaluation chip and the first evaluation chip being directly electrically conductively connected with the second evaluation chip. The first application-specific integrated circuit primarily includes analog circuit elements and the second application-specific circuit primarily includes digital circuit elements.

Micromechanical sensor

A method for calibrating a micromechanical sensor element, a piece of primary information describing a motion-state of the micromechanical sensor element being ascertained by the micromechanical sensor element during a first time interval, a piece of reference information describing the motion-state of the micromechanical sensor element being ascertained during a second time interval on the basis of an acoustic signal emitted by a sound source, the first time interval and the second time interval overlapping at least partially with respect to time, and the reference information being compared with the primary information in order to calibrate the micromechanical sensor element.

Method for calibrating a micromechanical sensor element and a system for calibrating a micromechanical sensor element

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Nufringen, Germany

Jochen Hahn