Nxp B.v.

Asm Technology Singapore Pte Ltd

Job Vianen

Marius Van Der Does

Jozef P W Stokkermans

Ralf Petrus Francis Noijen

Gerrit Arie Van Ooik

An optical station for a laser processing device including a plurality of holders for holding respective optical elements; a rotatable magazine having a plurality of accommodation spaces for accommodating the plurality of holders; a positioning device having a holder clamp for clamping and positioning a selected one of the optical elements. a magazine actuator for rotating the magazine; linear shifting means for shifting the magazine in a direction parallel to the optical axis, wherein the magazine is shifted towards the positioning device such that the positioning device lifts the holder from its accommodation space.

Optical station for exchanging optical elements

The present invention relates to an apparatus () for aligning an optical device with an object. The apparatus comprises, a frame (), a support unit () for supporting said optical device or said object and a transportation device () arranged to at least tilt the support unit in relation to the frame, wherein a segment of a sphere () is provided, which segment defines a spherical surface (), and the tilting movement of the support unit is controlled by said spherical surface. The apparatus according to the invention allows for a tilting movement between said optical device and said object, while such movement does not lead to a shift in focus. Furthermore the invention relates to an optical instrument and a semiconductor process system comprising said apparatus.

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Nijmegen, Netherlands

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