Carl Zeiss Smt Gmbh

Carl Zeiss Microscopy Gmbh

Joaquin Correa

Thomas Korb

Christian Wojek

Jens Timo Neumann

Dirk Zeidler

Christof Riedesel

Eugen Foca

Ramani Pichumani

Wolfgang Hoegele

Abhilash Srikantha

Philipp Huethwohl

Benjamin Tordoff

William Thompson

A method of enhancing a resolution of an EDS image of a sample includes generating an EDS image of the sample, generating a non-EDS image of the sample generating, using a machine learning algorithm, an enhanced resolution EDS image of the sample based on the generated feature map and based on the first EDS image, where a resolution of the enhanced resolution EDS image is higher than a resolution of the first EDS image.

Grain-based minerology segmentation system and method

A method includes obtaining at least one 2-D image dataset of semiconductor structures formed on a wafer including one or more defects during a wafer run of a wafer using a predefined fabrication process. The method also includes determining, based on at least one machine-learning algorithm trained on prior knowledge of the fabrication process and based on the at least one 2-D image dataset, one or more process deviations of the wafer run from the predefined fabrication process as a root cause of the one or more defects. A 3-D image dataset may be determined as a hidden variable.

Automated root cause analysis for defect detection during fabrication processes of semiconductor structures

A method, including: recording plural images of an object by scanning plural particle beams across the object and detecting signals generated by the particle beams, wherein the plural particle beams are generated by a multi-beam particle microscope; determining plural regions of interest; determining plural image regions in each of the recorded images; determining plural displacement vectors; and determining image distortions based on image data of the recorded images and the determined displacement vectors.

Method of recording an image using a particle microscope

Growing community of inventors

Oakland, CA, United States of America

Joaquin Correa