Hitachi, Ltd.

Joan Giner

Shinya Kajiyama

Yuhua Zhang

Provided is a gyroscope including: a first inertial body that is displaceable in a first direction and a second direction perpendicular to the first direction; a second inertial body that is displaceable in the first direction and the second direction; a third inertial body that is displaceable in the first direction and the second direction; a fourth inertial body that is displaceable in the first direction and the second direction; a first connection unit that supports the first inertial body; a second connection unit that supports the second inertial body; a third connection unit that supports the third inertial body; a fourth connection unit that supports the fourth inertial body; and a connection body that is provided among the first inertial body, the second inertial body, the third inertial body, and the fourth inertial body and connects the first inertial body, the second inertial body, the third inertial body, and the fourth inertial body.

Vibratory gyroscope including a plurality of inertial bodies

The purpose of this invention is obtaining a gyroscope with high Q factor, high as fabricated symmetry and reducing the quadrature error. One aspect of this invention is a gyroscope including a semiconductor chip. This semiconductor chip comprising a substrate, first mass, second mass, connection unit. The first mass can move in any direction of a X-Y plane. The second mass can move in any direction of the X-Y plane. The connection unit located between the first mass and the second mass mechanically connects the first mass and the second mass. The connection unit comprises anchor fixed to the substrate, first shuttle located between the anchor and the first mass, second shuttle located between the anchor and the second mass, first beam connecting the anchor and the first shuttle, second beam connecting the anchor and the second shuttle, third beam connecting the first mass and the first shuttle, fourth beam connecting the second mass and the second shuttle, and fifth beam connecting the first shuttle and the second shuttle. The anchor is located between the first shuttle and the second shuttle.

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Tokyo, Japan

Joan Giner