Carl Zeiss Smt Gmbh

Carl Zeiss Ag

Joachim Welker

Hubert Holderer

Matthias Manger

Ulrich Mueller

Markus Holz

Daniel Runde

Juergen Baier

Joerg Lichtenthaeler

André Orthen

Jochen Franke

Benedikt Hartmann

Christoph Stark

The disclosure relates to a method for setting and visualizing parameters of an objective lens of a camera, in particular for focusing on a moving object, and to a system for per-forming the method. The camera is, for example, embodied as a film camera, in particular as a film camera used in cinematography. The method includes the following steps: calcu-lating a relative position and an alignment of a depth of field of the objective lens in the 3D space, observing the 3D space and/or the object with an AR display and observation de-vice, displaying the relative position and the alignment of the depth of field of the objective lens as an image in the AR display and observation device and/or displaying a focal plane as an image in the AR display and observation device, and setting the objective lens to ob-tain a desired depth of field of the objective lens.

Method for adjusting and visualizing parameters for focusing an objective lens on an object and system for implementing the method

An objective lens main body and an objective lens system formed by the objective lens are provided. The objective lens main body includes a main frame for retaining optical functional elements and at least one adjustable, optical functional element that is retained adjustably thereon. The objective lens main body furthermore includes at least one adjustment drive arranged on the main frame for adjusting the adjustable functional element or at least one of the adjustable functional elements. In addition, the objective lens main body includes an electronics board attached indirectly or directly to the main frame that has at least one plug-in location for reversibly receiving a plug-in card, and a first controller that is configured as a plug-in card and inserted into the plug-in location or one of the plug-in locations and is set up for exchanging signals with an electrical module of the objective lens or an external unit.

Objective lens main body, objective lens, and objective lens system

The disclosure relates to a method for producing an illumination system for an EUV apparatus in and to an illumination system for an EUV apparatus.

Method for producing an illumination system for an EUV projection exposure system, and illumination system

Growing community of inventors

Heidenheim, Germany

Joachim Welker