Forschungszentrum Juelich Gmbh

Forschungszentrum Julich Gmbh

Joachim Müller

Bernd Rech

Tobias Repmann

Gunnar Schöpe

Hildegard Siekmann

Wolfgang Apenzeller

Brigitte Sehrbrock

A simple process is disclosed for treating substrates having pre-structured zinc oxide layers on rigid or flexible supports. The ZnO is treated with an etching medium then with a cleaning liquid. The treatment with the etching and cleaning liquids is carried out while the substrate is conveyed through a device. The process is technically simple to implement and makes it possible to regularly and homogeneously roughen and texturize ZnO layers of up to 1 m. The device for treating substrates having pre-structured zinc oxide layers on rigid or flexible supports has for that purpose a first means for treating the substrate with an etching liquid, a second means for treating the substrate with a cleaning liquid, and another means, in particular transport rollers, for conveying the substrate from the first to the second means.

Process and device for cleaning and etching a substrate with a transparent conductive oxide layer

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Fellbach, Germany

Joachim Müller