Robert Boschgmbh

Joachim Kreutzer

Lars Sodan

Dorothee Nonnenmacher

Gustav Klett

Friedhelm Guenter

Massimiliano Musazzi

Joachim Friedl

Raschid Baraki

David Slogsnat

Klaus-Volker Schuett

Michael Raedler

Patrick Stihler

Elmar Kroner

Yang Zou

Manuel Salvatore Santoro

Steven Maul

A method for manufacturing a pressure sensor having a pressure-sensitive medium. The method includes: providing a pressure sensor having a pressure sensor element, which is arranged in a receiving space of a housing of the pressure sensor; filling the receiving space with a pressure-sensitive medium; applying a second medium, which is immiscible with the pressure-sensitive medium, to a surface of the pressure-sensitive medium; forming a membrane in a boundary region between the pressure-sensitive medium and the second medium by way of a phase-transfer reaction between a first reactant and a second reactant, at least the first reactant or the second reactant being dissolved in the pressure-sensitive medium or in the second medium. A pressure sensor manufactured by the method is also described.

Method for manufacturing a pressure sensor having a pressure-sensitive medium, and pressure sensor

A sensor includes a sensing element for detecting a property and/or a composition of a surrounding medium of the sensor, a transmission medium for transmitting a property and/or a composition of the surroundings medium onto the sensing element, the transmission medium being situated in such a way that the transmission medium is applied to the sensing element, and a cover, which distances the transmission medium from the surrounding medium, the cover being manufactured from a self-healing material, in particular, the cover being designed as a flexible membrane which is made up of a self-healing material.

Pressure sensor with improved self-healing diaphragm

A pressure sensor includes a micromechanical sensor element including a pressure-sensitive diaphragm, which spans a cavity in a base material and includes a diaphragm electrode. A fixed counter electrode is situated inside the cavity and, with the diaphragm electrode, forms a first measuring capacitor for detecting a first measuring pressure. A reference capacitor is situated inside the cavity and includes a first and a second fixed reference electrode. The pressure sensor is operable in a first operating mode, in which the first measuring capacitor and the first reference capacitor are interconnected in a first bridge circuit. The pressure sensor is operable in a second operating mode, in which the diaphragm electrode, the counter electrode and the reference electrodes are interconnected in such a way that the diaphragm electrode, together with the at least one first reference electrode, forms a second measuring capacitor for detecting a second measuring pressure.

Pressure sensor with improved detection accuracy and compact design

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Reutlingen, Germany

Joachim Kreutzer