Gkss-forschungszentrum Geesthacht Gmbh

Gesellschaft Fur Kernenergieverwertung in Schiffbau Und Schiffahrt Mbh

Ckss Forschungszentrum Geesthacht Gmbh

Joachim Knoth

Harald Schneider

Heinrich Schwenke

Herbert Rosomm

Rainer Marten

Ulrich Weisbrod

Joachim Schwenke

A method and arrangement for analyzing specimens pursuant to the X-ray fluorescence analysis method utilizing a beam detector to detect a secondary beam that originates from the specimen that is to be analyzed and upon which is directed a primary X-ray beam, the path of which is adjustable in at least one axis of freedom. The surface of a specimen holder on which the specimen is placed is disposed parallel to, and at a defined distance from, a reference plane at which the primary beam is reflected under total reflection conditions. Subsequently, the path of the primary beam is adjusted relative to the reference plane while simultaneously detecting, with a detector, the radiation spectrum of the secondary beam of the specimen. At a predetermined energy level of the primary beam, a secondary beam intensity maximum, to which is assigned a specific reference angle, is determined.

Method and arrangement for analyzing specimens pursuant to the x-ray

The present invention relates to an arrangement for the non-destructive measurement of metal traces in the surface of material samples in which the surface is irradiated with X-ray radiation and a detector, fastened above the material sample, spectrometrically examines the fluorescent radiation emanating from the material sample. Metal impurities are detected in the surface of, for example, silicon wafers down to about 10.sup.11 atoms/cm.sup.2, on-line, with the wafers being free from contamination by the measuring process. It is possible to sweep the entire surface area of wafers having a diameter up to about 150 mm at the locations fixed by the respective standards. The X-ray radiation directed onto the surface of the material sample by means of an adjustable X-ray source, the divergence of the exciting X-ray radiation being limited by two aperture members, the aperture members being disposed in a quartz body serving as an optical bench. A positioning device is provided with which the material sample can be pressed against a surface of the quartz body.

Arrangement for the non-destructive measurement of metal traces

A measuring apparatus for X-ray fluorescence analysis in which the specimen s stimulated by glancing incident radiation and is examined spectrometrically by a detector disposed above the specimen. In the path of rays of the stimulating X-radiation there is disposed a reflector which in operation deflects the X-radiation to the surface of the specimen.

Measuring apparatus for X-ray fluorescence analysis

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Hamburg, Germany

Joachim Knoth