Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Joachim Janes

Ulrich Hofmann

Manfred Weiss

Frank Senger

Hans-Joachim Quenzer

Shanshan Gu-Stoppel

Thomas Von Wantoch

Christian Mallas

Hans Joachim Quenzer

Sascha Mühlmann

Felix Heinrich

Björn Jensen

Lars Ratzmann

The disclosure relates to an apparatus device for projecting an image on the retina of an eye with a laser projection device, a device for determining the orientation of the eye, and with a tracking unit for tracking the laser beam of the laser projection device according to the determined orientation.

Device apparatus for projecting a laser beam for generating an image on the retina of an eye

Embodiments of the present invention provide an apparatus including a micromirror, an excitation structure containing or supporting the micromirror, and at least one piezoelectric sensor. The excitation structure includes at least one piezoelectric actuator, the excitation structure being configured to resonantly excite the micromirror so as to cause a deflection of the micromirror. The at least one piezoelectric sensor is configured to provide a sensor signal dependent on the deflection of the micromirror, the piezoelectric sensor being connected to the excitation structure so that during the resonant excitation of the micromirror, the sensor signal and the deflection of the micromirror exhibit a fixed mutual phase relationship.

Piezoelectric position sensor for piezoelectrically driven resonant micromirrors

The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.

Radiation imaging sensor

A method for activating a deflection device comprising at least one deflection unit, for a projection device for projecting trajectories upon a projection surface, wherein the deflection device deflects electromagnetic radiation which is directed upon it, for producing trajectories, and the at least one deflection unit is activated by way of an activation signal delivered from a control device, for producing oscillations in each case with a turning amplitude at a direction change of the oscillation, about at least one deflection axis, wherein in the case of resonance, the oscillations have a maximal amplitude, at which the produced trajectories reach an edge of the projection surface. The activation signal is set in a manner such that the turning amplitude of the oscillations at least temporarily has a predefined value outside a region of the maximal amplitude of the oscillations, and an intensity distribution of the produced trajectories on the projection surface is achieved with a predefined intensity pattern. The document moreover relates to a deflection device as well as to a projection device.

Method for activating a deflection device for a projection device, a deflection device for a projection device, and a projection device

What is proposed is: a micromirror arrangement which comprises: a first spring-mass oscillator, which has an oscillatory body forming a mirror plate () and first spring elements (); a second spring-mass oscillator, which has a drive plate () and second spring elements () and which is connected to a carrier arrangement () via the second spring elements (), wherein the first spring-mass oscillator is suspended in the second spring-mass oscillator via the first spring elements (); and a drive arrangement (), which is assigned to the drive plate and is designed to cause the drive plate () to oscillate. The oscillatory body () is suspended, movably on two axes, via the first spring elements () on the drive plate (), and the drive plate () is connected, movably on two axes, to the carrier arrangement (), wherein the drive arrangement () is embodied as a two-axis drive and is designed to drive the drive plate () on two axes such that the oscillatory body () oscillates on two axes at in each case one of its orthogonal eigenmodes or close to this eigenmode.

Micromirror arrangement

The underlying invention presents a device which connects a vibratably suspended optical element to at least two actuators mounted fixedly on one side via curved spring elements, wherein the actuators are implemented to cause the vibratably suspended optical element to vibrate via the curved spring elements. Both the actuators and the entire system may be implemented to be more robust and be operated more reliably due to the curved shaping of the spring elements.

Device comprising a vibratably suspended optical element

A micromirror system that includes a chip frame, at least one spring element, and at least one mirror plate oscillatorily suspended in the chip frame via the at least one spring element. The chip frame and the at least one spring element include at least one microchannel which is provided with an inlet opening and an outlet opening for leading through a flowing coolant.

Micromirror system and method of manufacturing a micromirror system

The invention relates to a deflection device for a projection apparatus for projecting Lissajous figures onto an observation field which is made to deflect a light beam about at least one first and one second deflection axis for generating Lissajous figures having a deflection unit for producing oscillations about the deflection axes and having a control apparatus for producing control signals for the deflection unit having a first and second control frequency which substantially corresponds to the resonant frequencies of the deflection unit, wherein the deflection unit has a quality factor of &#x3e;3,000 and the control apparatus includes a feedback loop which is configured to regulate the first and/or second control frequencies in dependence on a measured phasing of the oscillations of the deflection unit so that the maximum amplitude of the oscillations remains in the resonant range of the deflection unit. The invention further relates to a projection apparatus having such a deflection device as well as to a method for controlling a corresponding deflection device.

Deflection device for a projection apparatus, projection apparatus for projecting an image and method for controlling a deflection apparatus for a projection apparatus

The invention relates to a micromechanical resonator arrangement, in particular micro-mirror scanner with an inner actuator, which comprises an oscillation body capable of oscillation about at least one axis, and with an outer actuator with an oscillating part. The inner and outer actuator form a coupled oscillation system, and the outer actuator is driven by an external drive whose drive frequency is selected in a manner such that the oscillation body of the inner actuator oscillates with one of its eigenmodes or close to this eigenmode. The inner actuator is at least one vacuum-encapsulated micro-actuator chip which is fastened on the oscillating part of the outer actuator.

Growing community of inventors

Itzehoe, Germany

Joachim Janes