Corning Incorporated

Other

Eastman-kodak Company

University of Rochester

Gca Corporation/tropel Division

Joachim Bunkenburg

Simon Magarill

G Michael Morris

John D Rudolph

Lovell Eglin Comstock, Ii

Roy A Auerbach

Brahim Dahmani

Terrance J Kessler

E Gregory Fulkerson

Peter M Hammond

Gunnar D Richardson

Hu Huang

Robert A Smythe

A plurality of gratings (G, G) are arranged together with a wavefront sensor, actuators, and feedback system to align the gratings in such a manner, that they operate like a single, large, monolithic grating. Sub-wavelength-scale movements in the mechanical mounting, due to environmental influences, are monitored by an interferometer (), and compensated by precision actuators () that maintain the coherently additive mode. The actuators define the grating plane, and are positioned in response to the wavefronts from the gratings and a reference flat, thus producing the interferogram that contains the alignment information. Movement of the actuators is also in response to a diffraction-limited spot on the CCD () to which light diffracted from the gratings is focused. The actuator geometry is implemented to take advantage of the compensating nature of the degrees of freedom between gratings, reducing the number of necessary control variables.

Grating array systems having a plurality of gratings operative in a coherently additive mode and methods for making such grating array systems

A rear projection screen for use with a projection lens which has an exit pupil () is provided. The screen has a light entering side and a light exiting side and comprises in order from said light entering side to said light exiting side: (a) a Fresnel structure (); (b) a lenslet array (); and (c) an opaque layer () comprising a plurality of pinholes, said pinholes being at locations which correspond to the images of the exit pupil formed by the combination of the Fresnel structure and the lenslet array.

Screen for rear projection display

Microlens arrays, especially useful for optical coupling in optical switches of fiber optic telecommunications systems are produced with optical quality requisite for such applications with a replicating tool. This tool is made using a form tool set up in a rotating spindle of a precision air bearing milling machine at an angle of inclination such that the point of zero surface velocity is maintained outside of the surface of substrate machined to make the tool for replicating the arrays. The tip of the form tool has a profile corresponding to the profile of the lenses of the array, such as a generally circular profile having a radius centered at the axis of rotation of the form tool. The form tool is reciprocated with respect to the surface so as to form cavities of the desired profile, radius and depth which corresponds each identical lens of the array. To provide arrays the form tool is raised and the substrate is translated to preprogrammed positions. When these positions are reached the reciprocation and cutting action of the tool is repeated. The replicating tool containing cavities defining the lenses of the array which provides a master. The master may be used to replicate identical arrays. Lenses so formed may be positive with convex surfaces. Arrays of lenses, which are negative and have concave surfaces, may be made using an intermediate master replicated from first master. The profile of the lenses may be altered by changing the shape of the form tool cutting surface or by translating the substrate during reciprocation of the formed tool as the profile of each cavity is being machined. In addition to lenses having optical power, reflectors with desired power may also be made with the machined master or intermediate master.

Methods and apparatus for making optical devices including microlens arrays

A system for projecting images is provided having a group of diffractive phase plates each encoded with different image information which have phase shifts aligned to reconstruct visible images in a Fraunhofer diffraction region. The plates are arranged along a path, and may represent successive frames of animation. A light source illuminates the plates and provides, when multiple plates are illuminated, a composite image representing image information encoded in such multiple plates. This composite image is a coincident superposition of reconstructed images from the multiple plates. A mechanism is provided for moving the plates along their path such that images projected from the system in the Fraunhofer diffraction region represent the composite image from successively different illuminated multiple plates or the reconstructed image from a single plate. Both monochromatic and multi-color channel phase plates may be used in the system.

Systems for projecting images from diffractive phase plates

Apparatus for treating the surfaces of a plurality of wafers, such as semiconductor wafers, which comprises a container of treatment fluid having an open upper side for accepting a cassette containing a plurality of vertically disposed wafers. The cassette is supported in the fluid in said container and a transducer carrier is mounted in the lower portion of the container. The carrier has at least one megasonic transducer arranged to project a beam of ultrasonic energy upwardly over the vertical surfaces of the wafers. The transducer carrier is moved parallel with the wafer surfaces transversely of the container whereby the ultrasonic energy beam contacts and treats the entire surface of all of the wafers therein.

Apparatus for treating wafers utilizing megasonic energy

A linear measurement interferometer 10 with a measurement axis directed toward a surface of a work piece 17 has a light source 11, a detection system 12, and a beam splitter 13 arranged to divide light from the source into test beams 21, 22, and 34 and reference beams 23, 24, and 33 that travel test and reference paths and recombine for detection by the detection system. Beam splitter 13 is arranged on the measurement axis with the work piece surface on one side of the beam splitter and the test beam path straddling the measurement axis on the opposite side of the beam splitter. A test beam retroreflector 25 mounted in the test path on the measurement axis reflects back the test beam from beam splitter 13 and is movable along the measurement axis without causing abbe error. A probe or focusing lens 15 movable along the measurement axis for measuring the work piece surface is interconnected with the test beam retroreflector 25 for movement together to determine a distance moved in measuring the work piece surface. A preferred way of arranging beam splitter 13 on the measurement axis while accommodating a probe is to bore a central aperture 20 in the beam splitter allowing the probe to pass through the beam splitter.

Compact, linear measurement interferometer with zero abbe error

Growing community of inventors

Victor, NY, United States of America

Joachim Bunkenburg