Centre National De La Recherche Scientifique

Commissariat a L'energie Atomique Et Aux Energies Alternatives

Office National D'etudes Et De Recherches Aerospatiales (Onera)

Onera

Office Nathional D'etudes Et De Recherches Aerospatiales—onera—chemie De La Huniere

Office National D'etudes Et De Recherches Aerospatiales

Joël Deschamps

Nicolas Guerineau

Jean-Jacques Yon

Jean-Luc Pelouard

Riad Haidar

Fabrice Pardo

Patrick Bouchon

Guillaume Druart

Stéphane Collin

Sylvain Rommeluere

Tatiana Grulois

Charlie Koechlin

Some embodiments are directed to a wide-field imaging system for the infrared spectral range. The system can include a vacuum chamber that is optically open for the passage of the field rays originating from the scene to be imaged, a cooled dark chamber placed inside the vacuum chamber and provided with a cold diaphragm, an infrared detector placed inside the cooled dark chamber, and a device for optically conjugating the field rays with the detector.

Wide-field infrared imaging system

According to one aspect, the invention relates to a microbolometer array for thermal detection of light radiation in a given spectral band, comprising a supporting substrate and an array of microbolometers () of given dimensions, arranged in an array. Each of said microbolometers comprises a membrane () suspended above said supporting substrate, said membrane consisting of an element () for absorbing the incident radiation and a thermometric element () in thermal contact with the absorber, electrically insulated from said absorber element. The absorber element comprises at least one first metal/insulator/metal (MIM) structure comprising a multilayer of three superposed films of submicron-order thickness i.e. a first metallic film (), a dielectric film (), and a second metallic film (), said MIM structure being able to have a resonant absorption of said incident radiation at at least one wavelength in said spectral band. The area of the microbolometer pixel covered by said membrane () is less than or equal to half of the total area of the microbolometer pixel.

Microbolometer array with improved performance

The invention aims to integrate a two-wave stationary interferometer on a photodetector during fabrication in order to constitute a miniature stationary Fourier transform spectrometer. The interferometer essentially comprises a plate having a first plane face coinciding with an image plane on semiconductor photosensitive elements and a second face that is not parallel to the first face. The second face reflects a wave that has a phase difference relative to the incident wave interfering with it that is a function of the local thickness of the plate.

Stationary fourier transform spectrometer

Growing community of inventors

Marcoussis, France

Joël Deschamps