Samsung Electronics Co., Ltd.

Jiye Kim

Jaebeom Park

Byungho Chun

Woongpil Jeon

Daihong Kim

Chan Kwak

Kwanghee Kim

Junghwa Kim

Mi Jeong Kim

Dong Su Ko

In Cheol Song

In Cheol Cheol Song

An apparatus for manufacturing a semiconductor device includes a chamber including a lower housing and an upper housing, heater chucks in the lower housing, shower heads on the heater chucks, the shower heads being between the lower housing and the upper housing, power supplies connected to the shower heads to provide radio-frequency powers to the shower heads, power straps in the upper housing to connect the shower heads to the power supplies, and shielding members in the upper housing, the shielding members enclosing the power straps and the shower heads, respectively, the shielding members to prevent electromagnetic interference of the radio-frequency powers between the power straps and between the shower heads.

Apparatus for and method of manufacturing semiconductor device

An electrical conductor includes a substrate; and a conductive layer disposed on the substrate and including a plurality of silver nanowires, wherein the silver nanowires exhibit a main peak assigned to a (111) crystal plane in an X-ray diffraction spectrum thereof, and a 2&#x3b8; full width at half maximum (FWHM) of the main peak after Gaussian fitting is less than about 0.40 degrees.

Silver nanowires, production methods thereof, conductors and electronic devices including the same

Growing community of inventors

Hwaseong-si, South Korea

Jiye Kim