Samsung Electronics Co., Ltd.

Jiwon Yeom

Hoon Bae Kim

Yusin Yang

Younghoon Sohn

Souk Kim

Seokjung Yun

Sungyoon Ryu

Kwangeun Kim

Seungbum Hong

A test apparatus includes a movable stage to support a sample, tips above the stage that have different shapes and alternately perform profiling and milling on the sample, a tip stage connected to a cantilever coupled to the tips, the tip stage to adjust a position of the cantilever, a position sensor to obtain information about a positional relationship between the tips and the sample, a stage controller to control movements of the stage and the tip stage, based on the information about the positional relationship, and a tip controller to select the tips for performing the profiling or milling and to determine conditions for performing milling, wherein a depth of the sample being processed by the milling in the first direction is controlled based on a relationship between a distance between the tips and the sample and a force between the tips and the sample.

Test apparatus and test method thereof

Growing community of inventors

Nonsan-si, South Korea

Jiwon Yeom