Samsung Electronics Co., Ltd.

Korea Advanced Institute of Science and Technology

Jiwon Yeom

Hoon Sik Kim

Yusin Yang

Younghoon Sohn

Souk Kim

Seokjung Yun

Sungyoon Ryu

Kwangeun Kim

Seungbum Hong

A method of operating an atomic force microscope (AFM) is provided. The method includes inspecting a sample by using the AFM and inspecting a tip of a probe of the AFM by using a characterization sample. The characterization sample includes a first characterization pattern that includes a line and space pattern of a first height, a second characterization pattern that includes a line and space pattern of a second height that is lower than the first height, and a third characterization pattern that includes a line and space pattern of a third height that is lower than the second height, and includes a rough surface.

Method of inspecting tip of atomic force microscope and method of manufacturing semiconductor device

Growing community of inventors

Daejeon, South Korea

Jiwon Yeom