Harbin Institute of Technology

JiWen Cui

Jiubin Tan

PengCheng Hu

JianWei Wu

ZhongPu Wen

Junning Cui

Kunpeng Feng

Junying Li

Yin Zhang

Fei Wang

An air suspension support and motion guiding device having unequal-depth throttling chambers. Throttling plugs () are arranged regularly on an air suspension working surface, forming an array of throttling chambers with unequal depths. The invention improves the rotational stiffness per unit area for an air suspension working surface while ensuring support and stability of an air-suspended rail () and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Air suspension support and motion guiding device having unequal-depth throttling chambers

A cantilever linear motion reference device employing two-layer air suspension. By means of a two-layer force sealed air suspension structure, the invention realizes two-dimensional air suspension support and motion guiding and improves the rotational stiffness per unit for an air suspension working surface. By combining accurate driving and feedback control, the invention achieves high speed, high acceleration, high frequency motion, and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Cantilever linear motion reference device employing two-layer air suspension

A method and equipment based on detecting the polarization property of a polarization maintaining fiber (PMF) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into polarization property changes of the PMF probe, and how to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the PMF probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.

Method and equipment based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part

A non-contact three-dimensional probing system based on a spherical capacitive plate has a probe including a spherical probing head (), a stylus pipe (), an active shielding pipe (), a signal conducting rod (), an insulating element (), a stylus holder () and a probe body (). The spherical probing head () is mounted at one end of the insulating element (), and it has a spherical capacitive plate over its surface. The capacitive signal coming from the spherical capacitive plate is outputted through the signal conducting rod (). The active shielding pipe () is driven by the signal converting and processing circuit () of the probing system to maintain equipotential with the signal conducting rod (), and so the influence of parasitic capacitance and spatial electromagnetic interference can be eliminated.

Ultraprecision non-contact three-dimensional probing system based on spherical capacitive plate

A micro-cavity measuring method and equipment based on micro focal-length collimation are provided. The equipment can be used to measure irregular micro-cavities and 'sub-macro' micro-cavities. Wherein a cylindrical or spherical lens with micro focal-length is combined with a fiber probe() to form a collimating and imaging optical system of a point light source(), and the collimating and imaging optical system transforms the two or three dimensional movement of the fiber probe() into a change in image ultra-highly sensitively. A lot of advantages are obtained, i.e., micro measuring force, high aspect ratio, easy miniaturization, high resolution, simple construction and high speed.

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Harbin, China

JiWen Cui