Taiwan Semiconductor Manufacturing Comp. Ltd.

Jiun-Shian Shiau

Constance Chu

Ying-Wei Hsu

Ming-Rong Fu

Rex Lin

Nai-Tien Ou

A recipe comparison system having recipe management ability in both offline accessing and online operating modes. The recipe comparison system includes an equipment server, an analysis module, and a recipe management module. The equipment server receives an upload signal, and then sends a recipe to the analysis module based on the upload signal. Then, the analysis module parses the recipe into internal-format-data according to a parsing rule, and outputs the internal-format-data to the recipe management module. If the recipe comparison system is in offline accessing mode, the recipe management module checks whether the internal-format-data obeys a specification definition. If the recipe comparison system is in the online operating mode, the recipe management module compares the internal-format-data with a standard recipe stored in a storage module.

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Kaoshiung Hsien, Taiwan

Jiun-Shian Shiau