Taiwan Semiconductor Manufacturing Comp. Ltd.

Jiun-Peng Wu

Chih-Hao Wang

Tien-Lu Lin

Tai-I Yang

Wai-Yi Lien

Ching-Wei Tsai

Tetsu Ohtou

Chi-Wen Liu

A semiconductor arrangement and method of formation are provided. The semiconductor arrangement comprises a conductive contact in contact with a substantially planar first top surface of a first active area, the contact between and in contact with a first alignment spacer and a second alignment spacer both having substantially vertical outer surfaces. The contact formed between the first alignment spacer and the second alignment spacer has a more desired contact shape then a contact formed between alignment spacers that do not have substantially vertical outer surfaces. The substantially planar surface of the first active area is indicative of a substantially undamaged structure of the first active area as compared to an active area that is not substantially planar. The substantially undamaged first active area has a greater contact area for the contact and a lower contact resistance as compared to a damaged first active area.

Semiconductor arrangement and formation thereof

Method and structure for enhancing channel performance in a vertical gate all-around device, which provides a device comprising: a source region; a drain region aligned substantially vertically to the source region; a channel structure bridging between the source region and the drain region and defining a substantially vertical channel direction; and a gate structure arranged vertically between the source region and the drain region and surrounding the channel structure. The channel structure comprises a plurality of channels extending substantially vertically abreast each other, each bridging the source region and the drain region, and at least one stressor interposed between each pair of adjacent channels and extending substantially along the vertical channel direction; the stressor affects lateral strain on the adjacent channels, thereby straining the channels in the vertical channel direction.

Method and structure for straining carrier channel in vertical gate all-around device

A semiconductor device includes a substrate, a pair of source/drain units, and a semiconductor sheet unit. The substrate includes a well region. The source/drain units are disposed above the well region. The semiconductor sheet unit is disposed substantially vertically, interconnects the source/drain units, and defines a cross-sectional shape unit in a top view. The cross-sectional shape unit includes a plurality of cross-sections that have substantially the same shape and different sizes.

Semiconductor device including a semiconductor sheet unit interconnecting a source and a drain

Method and structure for enhancing channel performance in a vertical gate all-around device, which provides a device comprising: a source region (); a drain region () aligned substantially vertically to the source region; a channel structure () bridging between the source region and the drain region and defining a substantially vertical channel direction; and a gate structure () arranged vertically between the source region and the drain region and surrounding the channel structure. The channel structure comprises a plurality of channels () extending substantially vertically abreast each other, each bridging the source region and the drain region, and at least one stressor () interposed between each pair of adjacent channels and extending substantially along the vertical channel direction; the stressor affects lateral strain on the adjacent channels, thereby straining the channels in the vertical channel direction.

A semiconductor device includes a substrate, a first source/drain (S/D), a second S/D, and a semiconductor sheet unit. The substrate extends in a substantially horizontal direction. The first S/D is formed on the substrate. The second S/D is disposed above the first S/D. The semiconductor sheet unit extends in a substantially vertical direction and interconnects the first S/D and the second S/D. A method for fabricating the semiconductor device is also disclosed.

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Hsinchu, Taiwan

Jiun-Peng Wu