Taiwan Semiconductor Manufacturing Comp. Ltd.

Jiun-Kai Huang

Wen-Sheh Huang

Chin-Wei Kuo

Min-Chie Jeng

Hsiu-Ying Cho

Sally Liu

Shu-Ying Cho

A method includes simulating characteristics of a first transmission line having a first length, and simulating characteristics of a second transmission line having a second length greater than the first length. A calculation is then performed on the characteristics of the first transmission line and the characteristics of the second transmission line to generate intrinsic characteristics of a third transmission line having a length equal to a difference of the second length and the first length.

Transmission line characterization using EM calibration

Provided is a method of de-embedding. The method includes forming a test structure having a device-under-test embedded therein, the test structure having left and right pads coupling the device-under-test, the device-under-test dividing the test structure into left and right half structures, the left and right half structures each having intrinsic transmission parameters; forming a plurality of dummy test structures, each dummy test structure including a left pad and a right pad; measuring transmission parameters of the test structure and the dummy test structures; and deriving intrinsic transmission parameters of the device-under-test using the intrinsic transmission parameters of the left and right half structures and the transmission parameters of the test structure and the dummy test structures.

Method and apparatus of deembedding

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Hsin-Chu, Taiwan

Jiun-Kai Huang