Nan Ya Technology Corporation

Jiun-Bo Wang

Chih-Kun Chen

Chih-Yuan Chen

Chia-Hung Su

Chung-Min Lin

Yao-Hsiung Kung

Shan-Chang Wang

Yuan-Chi Hsieh

Ming-Fa Tsai

Chih-Wang Hsu

A polishing delivery apparatus, configured to provide slurry and rinse agent to a polishing pad, includes a delivery arm, at least one first nozzle, and at least one second nozzle. The delivery arm is rotatably connected to the polishing pad and has an arc-shaped top surface facing away from the polishing pad, a bottom surface facing away from the arc-shaped top surface, and a recess indenting from the bottom surface. The first nozzle is mounted on the bottom surface of the delivery arm and has a first nozzle head facing toward the polishing pad. The second nozzle is mounted in the recess of the delivery arm and has three second nozzle heads, in which one of the three second nozzle heads faces toward the polishing pad, and the other two of the three second nozzle heads face toward sidewalls of the recess.

Polishing delivery apparatus

A device used for detecting the clamping force of a processed object and a method thereof are proposed. The device comprises a detection unit, a basis component and a pressure detection component disposed on the basis component. The basis component having the pressure detection component is closely placed between pivotal rods so that the detection unit can detect variation of electric properties of the pressure detection component to adjust the spacing between the pivotal rods, hence facilitating adjustment of the clamping force.

Device used for detecting clamping force of processed object and method thereof

Growing community of inventors

Taipei, Taiwan

Jiun-Bo Wang