Tokyo Seimitsu Co., Ltd.

Jiro Tsuchishima

Shinji Shibaoka

Shinji Nagatsuka

Kiyotaka Chiba

A cover for covering a processing chamber, in which a plurality of grooved rollers of a wire saw is arranged, is composed of an outside cover and an inner cover. The outside cover covers the plurality of grooved rollers, and the inner cover covers an ingot. This prevents slurry and cutting chips from scattering to the outside of the wire saw while it is slicing the ingot. When the ingot is attached and detached, a winch opens the outside cover and a cylinder apparatus opens the inner cover to expose the processing chamber.

Wire saw

The crystal orientation of a workpiece is determined and a tilt angle of the workpiece is adjusted based on the determined crystal orientation at the outside of a wire saw, and then the workpiece is attached to a workpiece feed table of the wire saw so that the slicing can be started.

Wire saw and slicing method thereof

A blade mounting structure in which a mounted blade is rotated in a well-balanced condition and further the blade can be easily attached to and detached from the apparatus is provided, which structure comprises a mount including a flange and a first cylindrical engagement portion and a first screw portion; a cutting blade including a second engagement portion; and a screw member including a second screw portion, wherein the cutting blade is mounted onto the mount so that the first engagement portion is engaged with the second engagement portion, and the second screw portion is screwed into the first screw portion and wherein the tolerance of the engagement portions, the thickness of the first engagement portion, the gap between the flange and the first engagement portion, and the diameter of the flange are selected to have a particular relationship such that the engagement portions are not engaged under an inappropriate contact condition when the blade is inserted into the mount.

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Mitaka, Japan

Jiro Tsuchishima