Seiko Epson Corporation

Jiro Kato

Hiroshi Ito

Toshihiro Shimizu

Eiju Hirai

Satoshi Denda

Hiromu Miyazawa

Koichi Morozumi

Ichiro Asaoka

Motoki Takabe

Koji Sumi

Chikara Kojima

Shiro Yazaki

Takahiro Kamijo

Tatsuro Torimoto

Toshiki Hara

Kinya Ozawa

Hiroyuki Tomimatsu

Yasumi Ikehara

Takayuki Yonemura

Hiroaki Tamura

Satomi Yoshioka

Hiroshi Yagi

Mitsuhiro Wada

Yoko Miyazawa

A piezoelectric element includes a piezoelectric layer containing a helical chiral polymer exhibiting piezoelectric properties, a first electrode layer, a second electrode layer, a first coupling portion provided on the first electrode layer, and a second coupling portion provided on the second electrode layer, in which an overlapped portion where the piezoelectric layer, the first electrode layer, and the second electrode layer overlap is circular shaped when viewed along a thickness direction of the piezoelectric layer, and the first coupling portion and the second coupling portion overlap with a center of the overlapped portion when viewed along the thickness direction of the piezoelectric layer.

Piezoelectric element

In a method of controlling a liquid ejecting apparatus, where the liquid ejecting apparatus includes a pressure chamber that communicates with a nozzle that ejects a liquid, a drive element that changes a pressure of the liquid in the pressure chamber, and a drive circuit that supplies the drive element with an ejection pulse that generates a change in the pressure that ejects the liquid from the nozzle, the method includes specifying a viscosity of the liquid in the nozzle and a surface tension of the liquid in the nozzle from a residual vibration when the pressure of the liquid in the pressure chamber is changed, and controlling a waveform of the ejection pulse according to the viscosity and the surface tension.

Liquid ejecting apparatus control method and liquid ejecting apparatus

A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.

Liquid ejection head and liquid ejection apparatus

A stimulus-responsive gel material includes: a polymeric material containing as constituent components, a first monomer having a chemical structure represented by the following formula (1) and a second monomer having higher hydrophobicity than the first monomer; fine particles having an average particle diameter of 10 nm or more and 1000 nm or less; and a solvent, wherein the wavelength of a reflected light from the material changes according to the concentration of salt to come in contact with the material.  In the formula (1), R is a substituent containing at least a carbon atom and a hydrogen atom, and when the number of carbon atoms in R is denoted by n and the number of oxygen atoms in R is denoted by m, n-m is an integer of 3 or more.

Stimulus-responsive gel material

A liquid ejecting head includes a flow channel forming substrate having pressure generation chambers communicating with a nozzle opening and arranged in parallel along a lateral direction. A piezoelectric element is provided on one surface of the flow channel forming substrate in correspondence to the pressure generation chamber, and has a first electrode, a piezoelectric layer provided on the first electrode and a second electrode provided on the piezoelectric layer. In a direction intersecting with the arrangement direction of the pressure generation chambers, in boundaries between an active section that is a substantial driving section and an inactive section that is not a substantial driving section of the piezoelectric layer, the first electrode includes a taper section of which a width is gradually decreased toward the boundary from the active section side.

Liquid ejecting head and liquid ejecting apparatus

There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium.

Liquid-ejecting head, liquid-ejecting apparatus, and piezoelectric device

A liquid ejecting head comprises a pressure generation chamber communicating with a nozzle opening, a vibrating wall provided as one surface of the pressure generation chamber and vibrates so that ejects the liquid from the nozzle opening, and a resin portion having a recessed arc-shape and formed in a corner of the pressure generation chamber and formed of a resin material having a Young's modulus of less than or equal to 10 GPa. A ratio r/w of a radius r of the surface of the resin portion to a width w of the pressure generation chamber defined by the vibrating wall is greater than or equal to 0.017 and less than or equal to 0.087.

A method for manufacturing a piezoelectric element includes a process for forming a first conductive layer, a process for forming a piezoelectric layer having a region serving as an active region, a process for forming a second conductive layer, which overlaps with the region, a process for forming a third conductive layer, which overlaps with the region, on the second conductive layer, a process for forming an opening portion that divides the third conductive layer into a first portion and a second portion, a process for forming a resist layer that covers the opening portion and a peripheral portion at the side of the opening portion of the first portion and the second portion; a process for etching the third conductive layer to form a first conductive portion and a second conductive portion, and a process for etching the second conductive layer to form a third conductive portion.

Method for manufacturing piezoelectric element and method for manufacturing liquid ejection head

The liquid ejecting head includes a nozzle plate in which nozzle holes which are through holes are formed, and ejects liquid from the nozzle holes. The nozzle hole has a first nozzle portion which is opened to an ejection surface to which liquid is ejected from nozzles of the nozzle plate, and a second nozzle portion which communicates with the first nozzle portion, and is opened to a surface opposite to the ejection surface of the nozzle plate, and of which the opening diameter is larger than the opening diameter in the ejection surface of the first nozzle portion. The first nozzle portion is covered with a liquid repellent film which has higher liquid repellency than a base material of the nozzle plate and an inner wall of the second nozzle portion is provided with a region which has lower liquid repellency than the liquid repellent film.

A manufacturing method of a piezoelectric element includes: forming a first conductive layer upon a substrate; forming a piezoelectric layer upon the first conductive layer; forming a second conductive layer upon the piezoelectric layer; forming a third conductive layer upon the second conductive layer; forming a first portion, a second portion, and an opening portion provided between the first portion and the second portion by patterning the third conductive layer; forming a resist layer that covers the opening portion and covers the edges of the first portion and the second portion that face the opening portion side; and forming a first conductive portion and a second conductive portion configured from the first portion and the second portion, and forming a third conductive portion configured from the second conductive layer, by dry-etching the second conductive layer using the first portion, the second portion, and the resist layer as a mask.

Growing community of inventors

Suwa, Japan

Jiro Kato