Mitsubishi Gas Chemical Company, Inc.

Jiro Ishikawa

Tetsuo Aoyama

Shuji Ebata

Hirofumi Higuchi

Koichi Kida

Naoto Sakurai

Eiji Shima

Carboxylic acid esters and formamide are efficiently obtained for reacting carboxylic acid amides and formic acid esters, or carboxylic acid amides, alcohols and carbon monoxide in the presence of an alkaline earth metal oxide catalyst.

Process for production of carboxylic acid esters and formamide

A process for production of high purity quarternary ammonium hydroxides, comprising electrolyzing quarternary ammonium hydrogencarbonates represented by the general formula: ##STR1## (wherein the symbols are as defined in the appended claims) in an electrolytic cell comprising an anode compartment and a cathode compartment defined by a cation exchange membrane. In accordance with this process, high purity quarternary ammonium hydroxides can be produced with high electrolytic efficiency and further without causing corrosion of equipment. Since the quarternary ammonium hydroxides produced by the present invention are of high purity, they can be effectively used as, for example, cleaners, etchants or developers for wafers in the production of IC and LSI in the field of electronics and semiconductors.

Process for production of quaternary ammonium hydroxides

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Niigata, Japan

Jiro Ishikawa