Robert Boschgmbh

Jiri Marek

Frank Bantien

Michael Offenberg

Martin Willmann

Horst Muenzel

Guenther Findler

Kurt Weiblen

Helmut Baumann

Hans-Peter Trah

Botho Ziegenbein

Franz Laermer

Uwe Konzelmann

Werner Herden

Erich Zabler

Andrea Schilp

Josef Kleinhans

Michael Mettner

Eckart Reihlen

Gerhard Benz

Thomas Grauer

Martin Maier

Joerg Muchow

Manfred Vogel

Hans Hecht

Wolfgang E Mueller

Armin Schuelke

Christian Doering

Klaus Heyers

Herbert Goebel

Dietrich Schubert

Michael Arndt

Rolf Becker

Martin Zechnall

Matthias Kuesell

Juergen Buchholz

Matthias Illing

Oliver Schatz

Gerhard Stokmaier

Manfred Lembke

Dieter Seipler

Uwe Guenther

Christoph Treutler

Steffen Schmidt

Ulrich Fleischer

Andreas Lock

Michael Barth

Martin Holland

Hans-Ulrich Gruber

Martin Warth

Joerg Buth

Dietmar Haack

Klaus Jaeckel

Hans-Juergen Kress

Horst Gschwendtner

Nils Kummer

Joerg Behnke

A device to detect the presence of a living being in a motor vehicle includes

Device and method to detect presence in a motor vehicle

An apparatus for supplying energy to a sensor co-moved with a wheel of a vehicle, which contains a generator co-moved with the wheel of the vehicle, the generator generating electrical energy from vibrational motions of the vehicle.

Method and apparatus for supplying energy to sensors

A mass flow sensor having a thin substrate and a resistor element arranged on the thin substrate. The thin substrate is stretched on a fixed substrate. In a stretched area, at which, in response to mechanical loading of the thin substrate, the mechanical stresses concentrate, a resistor element for detecting ruptures is arranged. As a result of a rupture in the stretched area, this rupture-detection resistor is interrupted, and the rupture can be confirmed due to the sudden increase in the resistance of the resistor, caused thereby.

Mass flow sensor with rupture detection

A sensor has a thin film element, the thin film element having a temperature-dependent electrical resistance. The thin film element includes a platinum layer, which is doped with zircon or zircon oxide. The thin film element can be arranged on a membrane to create a mass airflow sensor.

Sensor having a thin film element

An acceleration sensor has a seismic mass having movable electrodes. The movable electrodes are designed as differential capacitors between two fixed electrodes. Also provided are additional electrodes which are arranged opposite movable electrodes or opposite bending elements on which the seismic mass is suspended. Electrical voltages which are evaluated by the evaluation circuit as acceleration can be applied to the additional electrodes.

Acceleration sensor and measurement method

A method for manufacturing sensors from a multilayer plate with upper and lower monocrystalline silicon layers and an etching layer between them. The upper silicon layer is structured by the introduction of troughs therein extending down to the etching layer. Sensor structures, such as a bending beam that is used in an acceleration sensor, are created by etching the etching layer beneath a part of the silicon layer structured in this manner.

Method of manufacturing sensor

The pressure sensor for a combustion chamber includes a housing; a membrane closing the housing on its combustion chamber side; a monocrystalline silicon chip inside the housing and including a sensor circuit device provided with a bridge circuit device including a piezoresistor producing an electrical signal in response to applied pressure and a plunger positioned between the membrane and the silicon chip to transmit a pressure in the combustion chamber to the piezoresistor. The bridge circuit device is connected to an amplifier circuit located on the silicon chip. The amplifier circuit includes amplifier resistors having resistance values determinative of the offset of the signal and sensor sensitivity. A network circuit for offset and sensitivity adjustments is provided on the silicon chip and includes four adjusting circuits for offset, sensor sensitivity, temperature compensation of offset and for temperature compensation of sensor sensitivity. Each adjusting circuit includes parallel-connected adjusting circuit branches each including an adjusting resistor and a semiconductor element in series. The adjusting circuit branches of respective adjusting circuits are connected in parallel with respective amplifier resistors. A logic circuit also provided on the silicon chip is used to make predetermined semiconductor elements electrically conductive so that predetermined adjusting circuit branches can be made conductive with a resistance determined by the adjusting resistors in the predetermined adjusting circuit branches to make the respective adjustments.

Pressure sensor for measuring pressure in an internal combustion engine

Silicon chip for use in a force-detection sensor

A contacting of a capacitive accelerometer sensor of monocrystalline material is achieved by a capacitive accelerometer sensor having a structure etched out of a monocrystalline layer arranged on a substrate, including a seismic mass that is only joined to the substrate by suspension segments and executing a movement in its longitudinal direction in response to the occurrence of an acceleration of parallel, plate-like first fingers extending out from this mass at right angles to their longitudinal direction and of plate-like second fingers running parallel to the first fingers and anchored to the substrate. The first and second fingers form a capacitor arrangement. The suspension segments, which are anchored with their end region that is distant from the seismic mass to the substrate, and second fingers are electrically isolated, by an isolation strip, from the other remaining layer of monocrystalline material. A passivation layer extends over the isolation strip, and at least partially over the remaining layer. Conductors arranged on the passivation layer and serving as connecting leads for the capacitor arrangement extend across the isolation strip up to the connections of the capacitor arrangement, and are contacted there.

Capacitive accelerometer sensor and method for its manufacture

A method for manufacturing micro-mechanical components in which a structure is produced on a silicon layer, which is to be undercut in a further step. The silicon is selectively anodized for this undercutting operation. Thus, the method enables the manufacturing of micro-mechanical components that can be integrated together with bipolar circuit elements.

Method for manufacturing micro-mechanical components using selective

A mass flow sensor includes a measuring element arranged on a membrane that is clamped in a frame. The sensor is formed by introducing a recess into a silicon wafer. Through the application of a recess having perpendicular walls, the thickness of the frame can be reduced, thus allowing the required surface area of the wafer to also be reduced.

Mass flow sensor having a measuring element arranged on a membrane

An acceleration sensor and a method of making an acceleration sensor is described in which a movable sensor element is located in a hollow space formed in the middle of three silicon plates. During production, air can be removed from the hollow space through a hole in one of the two outer plates. The hole is then closed by an additional plate, which allows for a defined pressure to be set in the hollow space.

Acceleration sensor

A mass-flow sensor includes a measuring element on a membrane and a media-temperature measuring element on a separate membrane. By configuring the media-temperature measuring element on a membrane, the mass-flow sensor quickly reacts to changes in the temperature of the flowing medium.

Mass-flow sensor

A rotation rate sensor has a multi-layer structure including a monocrystalline silicon layer (10) which forms a carrier structure and a polysilicon layer (21), forming a second layer, and which includes a structural element (30) which acts as an oscillatory body. This structural element (30) is supported on the carrier structure (10) by a plurality of support strips (31), and is deflectable (2) perpendicularly to the major surface of the carrier structure (10). Capacitative or piezo-resistive detecting elements are formed from the second layer for detecting Coriolis force deflections (2), perpendicular to the major surface of said carrier (10) of the structural element (30).

Rotation rate sensor

A microminiature valve in multi-layered structure for switching or controlling fluid flows is proposed, having an inlet and a closing element. The inlet is embodied in a first layer in the form of at least one through-opening. The closing element is structured out of a second layer which is applied on the first layer. This second layer has at least one further through-opening in the area of the closing element. The closing element is displaceable by actuation means, in particular electrical ones, essentially parallel to the first layer and the second layer, so that in at least one first position of the closing element the at least one through-opening of the inlet, together with the at least one further through-opening in the second layer, forms at least one flow-through opening. The cross section of the at least one flow-through opening can be varied by actuating the closing element.

Microvalve

Growing community of inventors

Reutlingen, Germany

Jiri Marek