Applied Materials, Inc.

Jinyu Lu

Ludovic Godet

Takashi Kuratomi

Mingwei Zhu

Yue Chen

Daihua Zhang

Jinxin Fu

Yingdong Luo

David Masayuki Ishikawa

Zihao Yang

Yongmei Chen

Xiaopei Deng

Zhengping Yao

Jingyi Yang

Alexia Adilene Portillo Rivera

Qun Jing

A method of processing an optical device is provided, including: positioning an optical device on a substrate support in an interior volume of a process chamber, the optical device including an optical device substrate and a plurality of optical device structures formed over the optical device substrate, each optical device structure including a bulk region formed of silicon carbide and one or more surface regions formed of silicon oxycarbide. The method further includes providing one or more process gases to the interior volume of the process chamber, and generating a plasma of the one or more process gases in the interior volume for a first time period when the optical device is on the substrate support, and stopping the plasma after the first time period. A carbon content of the one or more surface regions of each optical device structure is reduced by at least 50% by the plasma.

Optical device improvement

Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to optical devices and methods of manufacturing a patterned optical device film on an optical device substrate. According to certain embodiments, an inkjet deposition process is used to deposit a patterned inkjet coating layer on the optical device substrate. A deposition process may then be used to deposit an optical device material on the patterned inkjet coating and the optical device substrate. The patterned inkjet coating on the optical device substrate may then be washed with an appropriate detergent to lift-off the patterned inkjet coating layer from the optical device substrate to form the patterned optical device film.

Patterning of optical device films via inkjet soluble mask, deposition, and lift-off

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Santa Clara, CA, United States of America

Jinyu Lu