Beijing Naura Microelectronics Equipment Co., Ltd.

Beijing Sevenstar Electronics Co., Ltd.

Naura Technology Group Co., Ltd.

Jinwei Dong

Shuai Yang

Qi Hao

Yanxiao Lu

Xinjia Lin

Ruilei Tan

A thermocouple fixing device and a temperature measuring apparatus including a fixing joint, a sealing sleeve, a clamping piece and a locking nut sequentially sleeved outside the outer cover of the thermocouple is disclosed. The inside end of the fixing joint is fixed on the side wall of the vacuum generation chamber, the outside end of the fixing joint abuts on one end of the sealing sleeve; the two sides of the clamping piece abut on the other end of the sealing sleeve and the inside end of the locking nut, respectively; the internal threads of the locking nut are meshed with the external threads of the fixing joint; the clamping piece has a clamping element and a through hole for clamping the outer over of the thermocouple.

Thermocouple fixing device and temperature measuring apparatus

The invention discloses a positioning device for a horizontal external ignition apparatus. The positioning device comprises a rotating module, an expansion module, a lifting module, and a mounting member fixed at the bottom of a water cooling device of the ignition apparatus. The rotating module drives the mounting member and the external ignition chamber of the ignition apparatus to rotate around the spindle member of the rotating module and adjust the rotation angle. The expansion module adjust the lateral movement of the mounting member and the external ignition chamber along the expansion member of the expansion module. The lifting module adjust the longitudinal movement of the mounting member and the external ignition chamber.

Positioning device for horizontal external ignition apparatus

A loading and unloading device and method for a quartz reaction tube of a semiconductor diffusion equipment are provided; the loading and unloading device is used in combination with a lifting device of the quartz reaction tube; the lifting device has an interface flange that can be connected to the reaction tube. The loading and unloading device includes a translation drive structure, a linear guide rail, a bracket, and an auxiliary support structure to detachably fix the quartz reaction tube. During the loading procedure, the auxiliary support structure is mounted on the bracket; the front end of the translation drive structure is docked with the doorframes of the semiconductor diffusion equipment through a fixing structure, and the quartz reaction tube is docked with the interface flange of the lifting device by horizontally moving the bracket along the linear guide rail.

Device and method for loading and unloading quartz reaction tube to and from semiconductor diffusion equipment

Growing community of inventors

Beijing, China

Jinwei Dong