Tsinghua University

Shanghai Micro Electronics Equipment Co., Ltd.

Beijing Stomatology Hospital, Capital Medical University

Beijing Sh Bio-tech Corporation

Jinsong Wang

Guanghong Duan

Yu Zhu

Wensheng Yin

Ming Lei Zhang

Kaiming Yang

Dengfeng Xu

Guang Cheng Li

Fugui Xie

Xinjun Liu

Jinchun Hu

Li Ni Zhang

Hua Wang

Yu Cao

Li Tian

Yan Xu

Yi Liu

Jing Yan Ma

Yujie Li

Zuze Wu

Songling Wang

Peiqing Ye

Xiaoqiang Tang

Qizhi Meng

Zenghui Chong

Jingchao Hu

Jianjin Bi

Yilin Xie

Wenqiang An

Yaying Chen

Kai Liao

Jiayong Cao

Jianyong Cao

Zenghui Xie

Xin-Jun Liu

A movable hybrid machining robot is provided based on a three-degree-of-freedom force-controlled parallel module. In one example, the robot comprises: an automated guided vehicle (III-) configured to ensure a large moving stroke of the robot; a linear guide rail (III-) configured to control movement of the hybrid robot when the automated guided vehicle (III-) is parked; a planar two-degree-of-freedom hybrid robotic arm configured to control in-plane two-degree-of-freedom motion, wherein the in-plane two-degree-of-freedom motion is driven by a motor on a base (); and a three-degree-of-freedom, force-controlled parallel machining module (I) configured to control one translational degree of freedom and two rotational degrees of freedom and to control positive pressure on an end effector ().

Movable hybrid machining robot based on three-degree-of-freedom force-controlled parallel module

The present invention discloses an machining device based on a portable 5-DOF parallel module. The machining device based on a portable 5-DOF parallel module comprises: a table for moving a parallel module to increase the stroke of the machine tool such that the machine tool can machine large components and can also simultaneously conduct the mounting and the machining of workpieces at different stations; a CNC rotary table; and a portable 5-DOF parallel module. The portable parallel module has a large swing angle range, can conduct the conversion between vertical and horizontal machining modes and can achieve five-face machining in one setup in cooperation with the CNC rotary table. The parallel module can move flexibly, and can machine large and complex components after mounted on the sliding table. After the machining of the workpiece is completed, the parallel module can move to the position of a mounted component through the table to conduct the machining of the next component. Thus, the mounting and the machining of the workpiece are simultaneously conducted at different stations, and the utilization rate and the production efficiency of the portable parallel module are improved.

Overhead machining device based on portable five-degree-of-freedom full parallel module

A two-degree-of-freedom parallel robot with a spatial kinematic chain includes a fixed platform, a movable platform, two driving devices, and two branch chains. Each driving device includes an active arm and a driving unit, and the two active arms are in the same reference plane. An end bracket is hinged on the active arm. Each branch chain includes two shaft rods and two chain rods. One of the two shaft rods is arranged on the active arm or the end bracket, and the other one thereof is arranged on the movable platform. The two chain rods and the two shaft rods form a parallelogram.

Two-degree-of-freedom parallel robot with spatial kinematic chain

Provided in the present invention are odontogenic stem cells and a use of genetically modified odontogenic stem cells for treating periodontal disease, repairing defects in periodontal bone tissues or soft tissues and/or promoting the regeneration of periodontal tissues, or in products for treating acute and chronic bone tissue injuries (e.g. bone fracture) or bone tissue defects. Also provided in the present invention is a composition comprising odontogenic stem cells and/or genetically modified odontogenic stem cells, wherein an exogenous hepatocyte growth factor gene is introduced into odontogenic stem cells through an adenovirus or adeno-associated virus vector to obtain the genetically modified odontogenic stem cells.

Usage of odontogenic stem cells and genetically modified odontogenic stem cells

Disclosed is a dual wafer stage switching system for a lithography machine. The system comprises a base stage (), a wafer stage () running at a pre-processing workstation, and a wafer stage () running at an exposure workstation. A rotating motor () is mounted under the base stage () for rotating the two wafer stages after the wafer stages have completed pre-processing and exposure operations in order to complete position switch of the wafer stages, wherein the base stage () is kept stationary during the switch. The present invention avoids rotation of a large inertia base stage and has low requirement for motor power, while eliminating a guide rail docking device and an auxiliary device and greatly simplifying system configuration. The system is easy and convenient to operate and easy to control.

Dual wafer stage switching system for a lithography machine

A two-dimensional locating method of a motion platform based on a magnetic steel array involves the following steps: placing more than four linear Hall sensors at any different positions within one or more polar distances of the magnetic steel array on the surface of the motion platform in a motion system; determining a magnetic flux density distribution model according to the magnetic steel array; determining the mounting positions of the above-mentioned linear Hall sensors, which are converted into phases with respect to the mass center of the motion platform; recording the magnetic flux density measured values of the linear Hall sensors as the motion proceeds; solving the phases of the mass center of the motion platform in a plane, with the measured values being served as observed quantities and the magnetic flux density distribution model being served as a computation model; and determining the position of the mass center of the motion platform with respect to an initial phase according to the phase, so as to realize the planar location of the motion platform. The present invention provides a simple, fast and robust method for computing mass center positions for a motion system containing a magnetic steel array.

Two-dimensional locating method of motion platform based on magnetic steel array

A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.

Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof

A dual-stage switching system for lithographic machine includes a wafer stage to be operated in an exposure station and another wafer stage to be operated in a pre-processing station. The two wafer stages are provided on a base, with four 2-DOF driving units capable of moving along X direction and Y direction being provided along the edge of the base, and the wafer stages being disposed in a space surrounded by the four 2-DOF driving units and suspended on an upper surface of the base by air bearings. Each of the 2-DOF driving units includes upper and lower linear guides and a guiding sleeve, with the upper and lower linear guides being installed vertical to each other in their corresponding guiding sleeve. Two adjacent 2-DOF driving units cooperatively drive the wafer stage) to move in the X direction and Y direction.

Dual-stage switching system for lithographic machine

A micro stage with 6 degrees of freedom used in super-precise processing and sensing equipment fields is disclosed. The micro stage has three sets of electromagnetic driving units arranged in a horizontal plane for driving the micro stage to obtain movements within the horizontal plane with 3 degrees of freedom in X, Y and &#x3b8;directions and three electromagnetic driving units arranged in a vertical direction for driving the micro stage to obtain additional movements with 3 degrees of freedom in Z, &#x3b8;and &#x3b8;directions. Direct driving by electromagnetic force is used in the invention. The invention is also applicable in super-precise processing and sensing fields for achieving 6 degree-of-freedom motions. The micro stage, which operates on the basis of Lorentz Law, provides a linear relation between the output pushing force and the input electrical current.

Micro stage with 6 degrees of freedom

According to the invention, configurations of X-windings and Y-windings in a synchronous permanent planar motor are improved, X-windings and Y-windings overlap in the direction normal to the planar magnet array and distribute on the entire surface of the thrust core, such that effective wires in the X-windings and Y-windings are lengthened and increased in number, therefore the electromagnetic force generated by the SPMPM of this invention is increased correspondingly; X-windings and Y-windings are mounted on a thrust core made of iron material, thus the electromagnetic force is further increased; in addition, two separated anti-yawing member are provided on the mover for counteracting yawing of the mover, accordingly interference between anti-yawing torque and the electromagnetic force for propelling is eliminated.

Synchronous permanent magnet planar motor

This invention discloses a scanning mechanism of an ion implanter. The mechanism is a PR-PRR type parallel mechanism with two subchains and two DOFs, driving the wafer holder to scan when the first subchain and the second subchain are translated in the same direction at the same speed and adjusting the rotational angle of the wafer holder when the first moving link () and the second moving link () in the first subchain and the second subchain have different translation amounts in the same direction or opposite directions. The driving motor for the scanning mechanism is provided outside the implant chamber. The invention also solves problems like low rigidity and large accumulation errors of existing serial scanning mechanisms and the effect of the electromagnetic field of the motor within the ion implant chamber on the trajectory of the ion beam.

Scanning mechanism of an ion implanter

This invention relates to the parallel structure of a spatial 3-axis machine tool with three degrees of freedom (3 DOF), which have two translational DOF and one rotational DOF. The machine tool includes a base, a mobile platform to which a tool may be attached, and three kinematic legs. Two of the three legs are in a same plane, and each have one 3-DOF spherical joint and two 1-DOF joints. The third leg has one 1-DOF joint and two universal joints. Compared with traditional machine tools, this invention possesses several advantages such as simple structure, high stiffness, low inertia, low cost, and high speed.

Parallel structure of a spatial 3-axis machine tool with three degrees-of-freedom

This invention belongs to the manufacturing fields, specially relates to the structure design of a type of multi-function parallel machine tool driven by sliders and an extensible strut. It includes: two vertical (or one horizontal) guide ways, two active sliders mounted on guide ways, two linear drive units used to move the active sliders, two struts, one movable platform to assemble cutter, one workbench to fix workpiece, one salve slider and one controlled extensible strut. Compared with traditional machine tools, this invention possesses several advantages such as simpler structure, better cutter dexterity, faster cutter feed rate, higher accuracy, and better thermal effect calibration.

Type of parallel machine tool frame driven by slider and extensible strut

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Beijing, China

Jinsong Wang