Semiconductor Manufacturing International (shanghai) Corporation

Shanghai Huali Microelectronics Corporation

Shanghai Huali Integrated Circuit Mfg. Co., Ltd.

Jinshuang Zhang

Haoyu Chen

Qiwei Wang

Shengfen Chiu

Juanjuan Li

Feng Ji

Rong Zou

Shaobin Li

Sheng-Fen Chiu

The present disclosure provides a non-volatile flash memory device and a manufacturing method thereof. The non-volatile flash memory device comprises at least a plurality of memory cells in a memory area. The manufacturing method comprises: providing a substrate, and defining the memory area of the non-volatile flash memory device on the substrate; forming a plurality of stack gates of the plurality of memory cells on a substrate corresponding to the memory area, and the top of each stack gate is a memory control gate of the memory cell; etching the memory control gates to reduce the height of the memory control gates with the fluid photoresist filled among the plurality of stack gates of the plurality of memory cells as a mask; and removing the fluid photoresist.

Non-volatile flash memory device and a manufacturing method thereof

The present disclosure provides a semiconductor device and a manufacturing method therefor. The manufacturing method for a semiconductor device is provided for forming through-holes in a semiconductor device, comprising: forming a plurality of shallow trench isolations in portions of a substrate corresponding to memory cell regions; forming a plurality of gates on surfaces of the portions of the substrate; forming spacers on side walls at both sides of the gates extending in the first direction; depositing a sacrificial layer on the memory cell region; removing portions of the sacrificial layer corresponding to the shallow trench isolations at memory cell drain, and depositing an isolation dielectric on the shallow trench isolations at the memory cell drain to form isolation strips; and removing the remaining sacrificial layer to form bottom through-holes in spaces formed after removing the remaining sacrificial layer.

Semiconductor device and manufacturing method therefor

A method for manufacturing a semiconductor device includes providing a semiconductor substrate having a core region and a peripheral region, and prior to forming a metal silicide in the core region, forming a sidewall layer on opposite sides of a gate structure of a core region device. The sidewall layer includes sequentially, from the inside out, a silicon oxide layer, a first silicon nitride layer, a first silicon nitride layer, a second silicon oxide layer, and a second silicon nitride layer, or the sidewall layer includes, from inside out, a first silicon nitride layer and a second silicon nitride layer. The sidewall layer having such structure ensures that the formed metal silicide has a good morphology in the core region to achieve good device performance.

Non-volatile memory device and method for manufacturing the same

The disclosed subject matter provides a memory device structure and a fabricating method thereof. The memory device structure includes a substrate including a device region and a peripheral region; multiple gate structures; a first dielectric layer, a second barrier layer, multiple source interconnecting lines, and multiple drain region plugs; a second dielectric layer in the device region include multiple source line plugs, and multiple second drain region plugs, and multiple controlling gate plugs; a third dielectric layer including multiple first conductive layers; a fourth dielectric layer including multiple interconnecting structures; a fifth dielectric layer including multiple second conductive layers; and a sixth dielectric layer including multiple third conductive layers.

Memory device structure and fabricating method thereof

Growing community of inventors

Shanghai, China

Jinshuang Zhang