Western Digital (fremont), Inc.

Sandisk Technologies Inc.

Western Digital Technologies, Inc.

Jinqiu Zhang

Feng Q Liu

Ming Sun

Hai Sun

Xiaoyu Yang

Ming Jiang

Hongping Yuan

Zhigang Bai

Liubo Hong

Xiaojun Zhang

Yong Shen

Tsung Yuan Chen

Xiaotian Zhou

Ying Hong

Hongmei Han

Mohamad Towfik Krounbi

Shaoping Li

Yugang Wang

Tao Pan

Donghong Li

Zeyu Ma

Yiming Huai

Wei Zhang

Yingjian Chen

Jing Zhang

Yun-Fei Li

Lien-Chang Wang

Satoru Araki

Honglin Zhu

Yunfei Li

Peng Luo

Xianzhong Zeng

Yifan Zhang

Krishna Bahadur Chetry

Yimin Guo

Ching-Huang Lu

Lijie Guan

Zhanjie Li

Ut Tran

Yizhong Wang

Yan Chen

Steven C Rudy

Guanghong Luo

Guanxiong Li

Lingyun Miao

Ming Zhao

Ronghui Zhou

Dehua Han

Yi Wang

Yunhe Huang

Lieping Zhong

Haifeng Wang

Li He

Masahiro Osugi

Henry H Yuan

Xiaohai Xiang

Lifan Chen

Yang Xiang

Ning Wu

Xiaoqi Liu

A magnetic recording head having air bearing surface (ABS) includes a main pole, a side shield laterally spaced from the main pole by a first side gap and a second side gap, an electrically conductive non-magnetic gap material layer disposed between the main pole and the side shield in the first side gap, and a dielectric non-magnetic gap material matrix and a conformal dielectric spacer layer disposed between the main pole and the side shield in the second side gap.

Plating based side shield define and application in magnetic head

Method of manufacturing a magnetic recording head

A magnetic recording head having an air bearing surface (ABS) includes a main pole, a side shield laterally spaced from the main pole by a first side gap and a second side gap, an electrically conductive non-magnetic gap material layer disposed between the main pole and the side shield in the first side gap, and a dielectric non-magnetic gap material matrix and a conformal dielectric spacer layer disposed between the main pole and the side shield in the second side gap. The dual side gap recording head can improve on track performance on write gap peak field, on track performance on write field gradient, ATI off track performance, WATER reliability and can provide advantageous writer and side shield saturation properties.

Plating based pre-defined side shield and application in magnetic head

A magnetic write apparatus has a media-facing surface (MFS) and includes an auxiliary pole, coil(s) and a main pole having a pole tip and a yoke. The pole tip occupies part of the MFS. The yoke has a yoke length measured from the MFS in a yoke direction perpendicular to the MFS. The yoke length is less than four microns. The main pole has a total length in the yoke direction and a width in a cross-track direction. The main pole is continuous along the total length. The aspect ratio of the main pole is the total length divided by the width and exceeds one. The main pole includes surface(s) having a nonzero acute flare angle from the MFS. The auxiliary pole is adjacent to the main pole and recessed from the MFS by not more than 1.05 micron. The coil(s) energizes the main pole and have not more than two turns.

Magnetic recording write apparatus having a pole having an aspect ratio greater than one and an auxiliary pole

A method provides a magnetic write apparatus. The method includes providing a pole including a pole tip, a yoke, a pole bottom and a pole top. The pole is seam free and formed vertically in a direction from the pole bottom toward the pole top. At least one coil for energizing the pole is also provided. In some aspects, providing the pole may include removing a portion of an intermediate layer to form a trench therein. The trench has a shape and location corresponding to the pole, a bottom, a top and sides. A conductive layer is deposited in the trench and on a top surface of the intermediate layer. Insulating layer(s) are provided on the sides of the trench. Only part of the conductive layer on the trench bottom is exposed. Pole material(s) are grown on the exposed portion of the conductive layer to provide the pole.

Method for providing a magnetic recording write apparatus having a seamless pole

A perpendicular magnetic recording (PMR) writer is configured to magnetically record data on a rotatable disk surface. The PMR writer including a pole tip, side shields, an air-bearing surface (ABS) region, a yoke region comprising Silicon Dioxide (SiO2), side gaps and a plurality of throat regions. The side gaps are arranged respectively between the pole tip and the side shields and include SiO2. A side gap width of the plurality of throat regions increases with a side shield throat height above the ABS region for each of the throat regions. The side gap width has a different width variation in each of the throat regions.

PMR writer with non-conformal side gaps

A method provides a magnetic transducer having a media-facing surface (MFS). The method includes providing a pole, providing a side gap, providing coil(s) for energizing the pole and providing side shield(s). A portion of the pole resides at the MFS. The side gap is between the pole and the side shield(s). The side shield(s) have a gradient in a saturation magnetization such that the saturation magnetization increases in a yoke direction perpendicular to the MFS. The step of providing the side shield(s) further includes providing a nonmagnetic structure having a side surface parallel to the MFS and providing at least one side shield layer. A portion of the side shield layer(s) are on the side surface. The portion of the side shield layer(s) has the gradient in the saturation magnetization. At least part of the side shield being formed by the portion of the side shield layer(s).

Method for fabricating a magnetic writer having a gradient in saturation magnetization of the shields

A method provides magnetic write apparatus. A side shield location layer having a location corresponding to the side shield(s) and back and side surfaces is provided. Part of the back surface corresponds to the back surface of the side shield. A nonmagnetic layer adjoining the back and side surface(s) of the side shield location layer is provided. A pole trench is formed in the layers using a first etch process. The nonmagnetic and side shield location layers have an etch selectivity of at least 0.9 and not more than 1.1 for the first etch. A pole is provided in the pole trench. A remaining portion of the side shield location layer is removed using a wet etch. The nonmagnetic layer is nonremovable by the wet etch. Side shield(s) having a back surface substantially the same as the back surface of the side shield location layer are provided.

Method for providing a magnetic recording write apparatus by predefining side shields

A shingle magnetic write apparatus is described. The shingle magnetic write apparatus includes a pole, a side gap, a write gap, a top shield and side shield(s). The pole has a pole tip region including a top wider than a bottom, and sides. The sides are at a sidewall angle from a down track direction. The write gap is adjacent to the pole top and between the top shield and the pole top. The side shield(s) are magnetically connected with the top shield and extend past the bottom of the pole. The side gap is between the side shield(s) and the pole. The side shield(s) have pole-facing surface(s) not more than a side shield angle from the down track direction. The side shield angle is less than the sidewall angle. The side gap width increases from the top near the gap to the bottom near the bottom of the pole.

Shingle magnetic writer having nonconformal shields

A main pole of a perpendicular magnetic recording write head is disclosed with a non-rectangular shape at the air bearing surface and a rectangular shape behind the air bearing surface. The main pole transitions from the non-rectangular shape to a rectangular shape at a distance of 10 nm to 100 nm behind the air bearing surface. The main pole includes leading and trailing beveled surfaces that extend from the non-rectangular shape of the pole at the air bearing surface toward the rectangular shape transition.

Perpendicular magnetic recording write head

A method provides a magnetic device having an air-bearing surface (ABS) location. A layer including first and second sublayers is provided. The first sublayer includes the ABS location. The second sublayer recessed from the ABS location such that part of the first sublayer is between the second sublayer and the ABS location. The first sublayer has a rear surface oriented at a nonzero, acute angle from a surface perpendicular to the ABS location. A trench is formed in the layer. The trench has a bottom, a top and sidewalls. The sidewalls form a first angle with a direction perpendicular to the bottom at the ABS location. The sidewalls form a second angle with the direction in part of the second sublayer. The second angle is smaller than the first angle. The sidewall angle varies along the rear surface of the first sublayer. A main pole is provided in the trench.

Method for fabricating a magnetic write pole having an improved sidewall angle profile

A method for forming a write pole comprises the steps of providing a structure comprising a substrate layer, a ruthenium layer over the substrate layer, and a tantalum layer over the ruthenium layer, providing an opening in the tantalum layer over a portion of the ruthenium layer, performing a first reactive ion etching step on the portion of the ruthenium layer under the opening in the tantalum layer to provide an opening in the ruthenium layer over a portion of the substrate layer, performing a second reactive ion etching step on the portion of the substrate layer under the opening in the ruthenium layer to form a damascene trench therein, and filling the damascene trench with a magnetic material to form the write pole.

Methods for fabricating damascene write poles using ruthenium hard masks

A method manufacturing a magnetic writer provides an intermediate layer including multiple sublayers is provided. The sublayers include first and second nonmagnetic layers and an etch stop layer being between the first and second nonmagnetic layers. A trench is formed in the intermediate layer using at least one etch, such as a reactive ion etch. The trench has a location and profile corresponding to the main pole. A main pole having a bottom and a top is provided in the trench. At least a portion of the second nonmagnetic layer is removed using at least a second etch, such as a wet etch process. The etch stop layer is resistant to the at least the second etch. A half side shield is provided on at least part of the first nonmagnetic layer. The half side shield bottom is between the top and the bottom of the main pole.

Method for fabricating a magnetic writer having half shields

A method provides a magnetic transducer having an air-bearing surface (ABS) location. An intermediate layer that includes a first sublayer in a side shield region and a second sublayer outside of the side shield region is provided. A trench is formed in the intermediate layer using multiple etches. A first etch removes part of the second sublayer, providing a first portion of the trench having a first sidewall angle. A second etch removes part of the first sublayer, providing a second portion of the trench having a second sidewall angle. The second sidewall angle is greater than the first sidewall angle. A main pole is provided in the trench and has a plurality of sidewalls. The sidewalls have the second sidewall angle in the second portion of the trench and at least one main pole sidewall angle corresponding to the first sidewall angle in the first portion of the trench.

Method for fabricating a magnetic writer using multiple etches of damascene materials

Growing community of inventors

Fremont, CA, United States of America

Jinqiu Zhang