Air Products and Chemicals, Inc.

Jiangsu Qingyang Energy Co., Ltd.

Jinping Wu

Hansong Cheng

Chenggang Zhou

Xinjian Lei

Manchao Xiao

Gauri Sankar Lal

David A Roberts

Daniel P Spence

John Anthony Thomas Norman

Thomas R Gaffney

Ming Yang

Bo Han

Yuan Dong

Aminosilane precursors for depositing silicon-containing films, and methods for depositing silicon-containing films from these aminosilane precursors, are described herein. In one embodiment, there is provided an aminosilane precursor for depositing silicon-containing film comprising the following formula (I):(RRN)SiR&#x2003;&#x2003;(I)wherein substituents Rand Rare each independently chosen from an alkyl group comprising from 1 to 20 carbon atoms and an aryl group comprising from 6 to 30 carbon atoms, at least one of substituents Rand Rcomprises at least one electron withdrawing substituent chosen from F, Cl, Br, I, CN, NO, PO(OR), OR, SO, SO, SOR and wherein R in the at least one electron withdrawing substituent is chosen from an alkyl group or an aryl group, Ris chosen from H, an alkyl group, or an aryl group, and n is a number ranging from 1 to 4.

Precursors for depositing silicon-containing films and methods for making and using same

We have used the state-of-the-art computational chemistry techniques to identify adhesion promoting layer materials that provide good adhesion of copper seed layer to the adhesion promoting layer and the adhesion promoting layer to the barrier layer. We have identified factors responsible for providing good adhesion of copper layer on various metallic surfaces and circumstances under which agglomeration of copper film occur. Several promising adhesion promoting layer materials based on chromium alloys have been predicted to be able to significantly enhance the adhesion of copper films. Chromium containing complexes of a polydentate &#x3b2;-ketoiminate have been identified as chromium containing precursors to make the alloys with chromium.

Materials for adhesion enhancement of copper film on diffusion barriers

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Wuhan, China

Jinping Wu