Chinese Academy of Sciences

The Institute of Optics and Electronics

Jinlong Li

Liping Wang

Song Hu

Lixin Zhao

Zhixiang Zeng

Feng Xu

Xia Lu

Zhuang Sheng

Lanlan Li

Zechao Li

Yongxin Wang

Jingwen Zhang

Minpeng Dong

The preparation method for a nano composite coating having a shell-simulated multi-arch structure includes: constructing a discontinuous metal seed layer using a vacuum plating technology; and inducing the deposition of a continuous multi-arch structure layer utilizing the discontinuous metal seed layer, thereby realizing the controllable orientated growth of the nano composite coating having the shell-simulated multi-arch structure. The nano composite coating having the shell-simulated multi-arch structure is of a red abalone shell-simulated nacreous layer aragonite structure, meanwhile has high hardness and high temperature resistance, has excellent performances such as high breaking strength, low friction coefficient and corrosion and abrasion resistance in seawater under the condition of maintaining good breaking tenacity, is simple and controllable in preparation process and low in cost, has unlimited workpiece shapes, is easily produced on large scale, and has huge potential in the fields of new energy, efficiency power, ocean engineering, nuclear energy, and micro-electronic/optoelectronic devices.

Nano composite coating having shell-simulated multi-arch structure as well as preparation method and application thereof

Disclosed is a post-processing method for improving anti-wear and friction-reducing properties of a CrN coating. According to the method, the CrN coating is subjected to a thermal cycling treatment in a temperature range of &#x2212;20&#xb0; C. to 60&#xb0; C. under a humidity environment of 60%-80% R.H. The post-processing method can substantially improve the anti-wear and friction-reducing properties of the CrN coating, so that friction pair parts deposited with the coating achieve a stable operation for a long time.

Post-processing method for improving anti-wear and friction-reducing properties of CrN coating

Disclosed is a focus detection apparatus for a projection lithography system. The apparatus includes: a laser; a focus optical unit configured to focusing the emitted laser beam; a force detection unit configured to reflect the focused laser beam at the backside; a position detection unit configured to detect variations in position of a light spot formed by the reflected laser beam, and output a strength signal indicating the strength of the interaction force between the force detection unit and the object; a differential amplifier configured to output a Z-direction differential signal based on the strength signal and a reference signal; a Z-direction feedback control unit configured to perform feedback control; and a scan signal generator configured to output a signal for controlling the movement of the stage in the XY plane. The focus detection apparatus has high precision, efficiency and process applicability.

Focus detection apparatus for projection lithography system

Growing community of inventors

Zhejiang, China

Jinlong Li