Wd Media, LLC

Jinliang Chen

Yew Ming Chiong

Allen J Bourez

Robert D Hempstead

Kinya Nippa

Noe D Taburaza

A processing system for and a method of producing ions inside a process chamber and shielding the ions from a magnetic field by directing the magnetic field through a magnet keeper is described.

Processing system having magnet keeper

A disk processing system with a corner chamber having a heater assembly and a carrier rotary assembly configured to rotate the heater assembly.

Corner chamber with heater

A disk processing system with a load chamber having a stationary heater and a movable heater.

Load chamber with dual heaters

A magnetic particle trapper for use in a sputtering system includes a roller cover plate having a plurality of openings arranged and dimensioned to accommodate a plurality of rollers associated with a mechanical transport mechanism of the sputtering system, and a plurality of magnets to trap magnetic particles, the plurality of magnets being attached to the roller cover plate in locations proximate to the plurality of openings.

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Fremont, CA, United States of America

Jinliang Chen