Samsung Electronics Co., Ltd.

Jinho So

Dongwon Kim

Jongkyu Kim

Minyoung Kim

Hyungho Choi

Beomsoo Hwang

Yi Jin

Soonwook Hwang

Kyeongsup Byeon

Byungjun An

Yinghu Xu

Huigwan Lee

Inwook Koo

Jaehwa Yang

Kwangiun Kim

Chigun An

Junhyong Lee

A chemical supply system, includes: a chemical container receiving station configured to receive a chemical container, inspect chemical information of the chemical container and confirm the chemical information; a temporary storage configured to store the chemical container; a chemical supply device configured to supply a chemical in the chemical container to a place of use of the chemical; a first robot configured to transport the chemical container for which the chemical information is confirmed from the chemical container receiving station; and a second robot configured to carry the chemical container transported by the first robot into the chemical supply device.

Chemical supply system

A gas cylinder automation system may include: a transfer path automatically supply gas in a gas cylinder brought into the gas cylinder automation system to a semiconductor process line; and a cylinder-type sensor checking whether the transfer path is abnormal by moving along the transfer path, wherein the cylinder-type sensor includes: a cylinder head including an end cap fastening member and an end cap coupled to the end cap fastening member and having a first detecting sensor disposed on the end cap fastening member to detect one of a force or torque applied to the end cap and a cylinder body connected to the cylinder head and having a second detecting sensor including at least one of an acceleration sensor or an inclination sensor mounted thereon.

Gas cylinder automation system

A gas supply system includes a loading/unloading stage including a cradle loader where a cradle loaded with a gas container is loaded, a test buffer chamber is configured to test the gas container, and a loading/unloading robot configured to transfer the gas container between the cradle and the test buffer chamber. A gas supply stage includes a storage queue configured to temporarily store the gas container, a gas supply cabinet where the gas container is mounted, and a transfer robot configured to transfer the gas container between the test buffer chamber and the storage queue and between the storage queue and the gas supply cabinet.

Transfer robot for transferring gas container, gas supply cabinet, and gas supply system including the same

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Seoul, South Korea

Jinho So