Hon Hai Precision Industry Co., Ltd.

Tsinghua University

Jing Qi

Shou-Shan Fan

Liang Liu

Pi-Jin Chen

Peng Liu

Li Qian

Jie Tang

Zhao-Fu Hu

Yang Wei

Duan-Liang Zhou

Chun-Hai Zhang

Lei-Mei Sheng

An ionization vacuum gauge includes a cathode, an anode and an ion collector. The ion collector component is located at one side of the anode component and spaced from the anode component. The cathode component is located at another side of the anode component and includes an electron emitter, which extends toward the anode component from the cathode component. The electron emitter includes at least one carbon nanotube wire.

Ionization vacuum gauge

A sputter ion pump includes one vacuum chamber, two parallel anode poles and one cold cathode electron emitter. The vacuum chamber includes at least one aperture located in an outer wall thereof. The two parallel anode poles are positioned in the vacuum chamber and arranged in a symmetrical configuration about a center axis of the vacuum chamber. The cold cathode electron emission device is located on or proximate the outer wall of the vacuum chamber and faces a corresponding aperture. The cold cathode electron emission device is thus configured for injecting electrons through the corresponding aperture and into the vacuum chamber. The sputter ion pump produces a saddle-shaped electrostatic field and is free of a magnetic field. The sputter ion pump has a simplified structure and a low power consumption.

Sputter ion pump

An ion generator () generally includes: a shielding shell (), a cathode device (), and an annular anode (). The shielding shell has a first end (), an opposite second end () and a main body () therebetween. The first end has an electron-input hole (). The second end has an ion-output hole (). The main body has a gas inlet () for introducing an ionizable gas (). The cathode device faces the electron-input hole for emitting electrons to enter the shielding shell so as to ionize the ionizable gas thereby generating ions. The cathode device includes a conductive base () and at least one field emitter () thereon. The annular anode is arranged in the shielding shell. The anode is aligned with the ion-output hole.

Ion generator

A cold cathode device () includes a grid (), a cold cathode () positioned under the grid, and a shield electrode () positioned above and parallel to the grid. A vacuum gauge includes a shell (), a collector (), an anode (), and the cold cathode device of the present invention. The cold cathode device and the collector are positioned symmetrically relative to the anode. The collector, the grid and the cold cathode device are received in the shell. The shield electrode can shield an electric field of the grid for preventing from disturbing a symmetrical saddle field in the vacuum gauge. Electrons produced by the cold cathode device can obtain a long electron track because the electron vibration in the saddle field is symmetrical. Thus, the vacuum gauge has an improved sensitivity, and can be widely used to measure pressure in ultra-high and extremely high vacuum conditions.

Cold cathode device and vacuum gauge using same

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Beijing, China

Jing Qi