International Business Machines Corporation

Beijing Naura Microelectronics Equipment Co., Ltd.

Heilongjiang Feihe Dairy Co., Ltd.

Jing Jing Wei

Gang Wei

Yue Wang

Jing Yang

Dian Guo Zou

Yu Zhang

Xin Zhang

Qi Zheng

Jia Wang

Yang Jiao

Yanjie Zhang

Yi Fan Wu

Shiping Zou

Zi Hui Duan

Wei An

Xin Peng Liu

Jian Nan Guo

Shao Jun Ding

Xiaoyang Cheng

Shu Jun Tang

Lu Sun

Yang Kang

Yingchun Guo

Yu Meng Li

Liang Wang

Shuo Zhang

Jun Lu

Zhi Li Guan

Shu Chao Wan

Ling Lan

Guibin Wang

Xingcun Li

Guodong Chen

Da Guang Sun

Chenyu Zhong

Yahui Huang

Jinzhi Bai

Guodao Shan

Yueping Hua

Ping Mei

Yanyan You

Xin Yue

Bing Ding

Haitao Wang

Juanjuan Li

A power control method of a lower RF power supply of semiconductor processing equipment includes, when a processing chamber starts semiconductor processing, with a predetermined power compensation equation and according to a pre-obtained first RF circuit parameter set of a reference chamber and a second RF circuit parameter set of a present processing chamber performing the semiconductor processing, obtaining a power compensation coefficient of the present processing chamber relative to the reference chamber, according to the power compensation coefficient and a power setting value of the lower RF power supply of the present processing chamber, calculating a power compensation value of the present processing chamber relative to the reference chamber, and controlling the lower RF power supply to output the power compensation value.

Power control method and device of lower radio frequency power supply and semiconductor processing equipment

A computer-implemented method, system and computer program product for identifying a root cause of failures in a CI/CD pipeline. Tags for tasks, templates and/or variables of the operator and the CI/CD pipeline are extracted. Code of the tagged tasks, templates and/or variables of the operator are mapped with the code of the tagged tasks, templates and/or variables of the CI/CD pipeline forming mappings. Additionally, code of the tagged tasks, templates and/or variables between the roles of the operator are mapped forming mappings. Upon receiving a notification of a failure in the CI/CD pipeline, a root cause of the failure is identified by searching such mappings for a mapped role or task in relation to the role or task involving the software product which failed in the CI/CD pipeline and searching the log file of the operator for an error in connection with such mapped role or task.

Performing CI/CD error analysis involving software products that are dependent upon each other

The present disclosure provides a power adjustment method of an upper electrode power supply of a semiconductor process apparatus. The method includes obtaining a processing load of an upper electrode power supply of a reference process chamber and a processing load of an upper electrode power supply of a current process chamber corresponding to semiconductor process step, when starting to perform a semiconductor process step, determining a power compensation coefficient for the current process chamber relative to the reference process chamber based on the processing load of the current process chamber and the processing load the reference process chamber, and controlling the upper electrode power supply to output compensation power. The compensation power is a product of the set power of the upper electrode power supply of the current process chamber corresponding to the semiconductor process step and the corresponding power compensation coefficient.

Power adjustment method of upper electrode power supply and semiconductor process apparatus

The present disclosure provides an impedance-matching method applied to a semiconductor process apparatus, an impedance-matching device, and the semiconductor process apparatus. The impedance-matching method includes adjusting a parameter value of an adjustable element of an impedance-matching device to a preset initial value at beginning of a process, when a radio frequency (RF) power supply is powered on, adjusting the parameter value of the adjustable element according to a pre-stored optimal matching path corresponding to the process, and adjusting the parameter value of the adjustable element using an automatic matching algorithm after reaching end time of the preset matching period until impedance-matching is achieved. The optimal matching path includes parameter values of the adjustable element corresponding to different moments in a preset matching period.

Impedance-matching method, impedance-matching device, and semiconductor process apparatus

Intelligent process management is provided. A start time is determined for an additional process to be run on a worker node within a duration of a sleep state of a task of a process already running on the worker node by adding a first defined buffer time to a determined start time of the sleep state of the task. A backfill time is determined for the additional process by subtracting a second defined buffer time from a determined end time of the sleep state of the task. A scheduling plan is generated for the additional process based on the start time and the backfill time corresponding to the additional process. The scheduling plan is executed to run the additional process on the worker node according to the start time and the backfill time corresponding to the additional process.

Intelligent process management in serverless workflow cloud environments

A coordinator module for improving communications within a cloud computing system is disclosed. The coordinator module initiates transaction requests by generating a coordination context, where the coordination context includes a transaction context, a coordination type, and an initiator supplemental address. The coordinator module includes a supplemental address handler for creating the initiator supplemental address that unique identifies the coordinator module and the associated pod. The coordinator module receives transaction responses, where the transaction response includes a coordination context. The coordinator module includes a transaction context checker to verify that the transaction response was not received in error, by comparing the received transaction context with a saved transaction context. The coordinator module includes a registration bridge that identifies an alternate coordinator module and alternate pod to process the transaction response if the transaction contexts do not match. The registration bridge compares the received initiator supplemental address with a saved supplemental address that uniquely identifies each coordinator module and associated pods in the cloud partition. The registration bridge forwards the transaction request to the alternate coordinator module if a match is found, thereby creating a communication path to successfully process the transaction. If no match is found, the coordinator module indicates that the transaction must be retried. A corresponding method and computer program product are also disclosed.

Improving communication protocols relating to transactions within cloud computing environments

Lid for packaging container

Embodiments of the present disclosure relate to rollback of services with a global variable change. Embodiment techniques detect that at least two of a plurality of services in a transaction are executed to change a value of a first global variable. Tracing information is obtained to indicate a first order in which the at least two services change the value of the first global variable during execution of the plurality of services. In response to a failure of the transaction, a rollback execution plan for a plurality of compensating services is determined at least based on the tracing information, where the plurality of compensating services are configured to compensate for the plurality of services respectively. The plurality of compensating services subsequently executed according to the rollback execution plan.

Rollback of services with a global variable change

A pulse modulation system of a radio frequency (RF) power supply includes a modulation output circuit and a frequency adjustment circuit. The modulation output circuit is configured to modulate an output signal of the RF power supply and output a pulse modulation RF signal. Each pulse cycle of the pulse modulation RF signal includes a pulse-on phase and a pulse-off phase. An overshoot sub-phase is set in an initial preset time of the pulse-on phase. The frequency adjustment circuit is electrically connected to the modulation output circuit. The frequency adjustment circuit is configured to adjust an RF frequency of the pulse modulation RF signal of the overshoot sub-phase to cause a reflected power of the overshoot sub-phase to satisfy a preset reflected power or a reflected coefficient to satisfy a preset reflected coefficient.

System and method for pulse modulation of radio frequency power supply and reaction chamber thereof

The present disclosure provides a radio frequency (RF) source control method. An RF source includes at least one pair of a main power supply and a secondary power supply with a same frequency. The RF source control method includes dividing each process step of process steps of a plasma process into a plurality of time periods, and when performing each process step, maintaining a common exciter (CEX) phase locking delay angle of the at least one pair of the main power supply and the secondary power supply corresponding to each of the time periods at a predetermined value to provide an increased angular distribution uniformity of plasma. The RF source control method provided by the present disclosure may be used to adjust plasma distribution above a to-be-processed workpiece to average the plasma angular direction distribution of the entire process step as a whole to increase process uniformity of the to-be-processed workpiece.

Control method of radiofrequency source

Solar power bank

A method, computer program product, and computer system for processing instances of message sequences. Two or more instances are received. Each instance has an instance number and an associated instance Id. Each instance includes a stream of one or more messages. Each message in each stream is associated with a respective task. All messages in the two or more instances whose respective tasks have been completed are distributed into partitions in the broker. Different messages in each instance of at least one instance are distributed into different partitions. The messages distributed in the partitions include parallel task messages. The parallel task messages are sequenced by being grouped by the instance number or instance Id and are sequentially ordered in each group in an ascending order of a timestamp of arrival of each parallel task message at the broker. The parallel task messages in each instance are dispatched to a service.

Processing concurrent message sequences

Approaches presented herein enable hot upgrading a microservices sequence in a cloud computing environment. More specifically, a next microservice of microservice subsequence in a running sequence is obtained, in response to a message to invoke the microservice or subsequence. The running microservice sequence includes at least one unexecuted microservice or subsequence that is to be hot upgraded. The running microservice sequence is generated based on a sequence that is to be hot upgraded which comprises an ordered list of microservices and/or subsequences. The approach may include determining the status of a next microservice or subsequence. The approach may further include invoking the next microservice or subsequence in the running sequence, in response to the status of the next microservice or subsequence being upgrade-complete.

Upgrading a sequence of microservices in a cloud computing environment

Growing community of inventors

Beijing, China

Jing Jing Wei