Chinese Academy of Sciences

Jinfeng Jia

Xiaolong Du

Zhaoquan Zeng

Handong Li

Qikun Xue

Hongtao Yuan

The present invention concerns a high vacuum in-situ refining method for high-purity and superhigh-purity materials and the apparatus thereof, characterized in heating the upper part and lower part of crucible separately using double-heating-wires diffusion furnace under vacuum, thereby forming the temperature profile which is high at upper part and low at lower part of crucible, or in reverse during different stages; then heating the crucible in two steps to remove impurities with high saturation vapor pressure and low saturation vapor pressure respectively in efficiency; and obtaining high-purity materials eventually. The whole procedure is isolated from atmosphere, reducing contamination upon stuff remarkably. The present invention could provide products with high-quality and high production capacity, which are stable in performance, therefore is reliable and free from contamination. The present invention is appropriate for manufacture of high-purity and superhigh-purity materials, particularly for manufacture of high-activity high-purity materials.

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Beijing, China

Jinfeng Jia