Applied Materials, Inc.

Jin Yi

Steven M Zuniga

Hung Chih Chen

Tetsuya Ishikawa

Jeonghoon Oh

Thomas H Osterheld

Kun Xu

Jimin Zhang

James Chang Wang

Yutao Ma

Samuel Chu-Chiang

A flywheel based energy storage apparatus includes a housing and a hub-less flywheel mounted within the housing. The hub-less flywheel has a mass which is shifted radially outwards from a central axis of the hub-less flywheel thus increasing the energy density of the apparatus. The flywheel includes an outer axially extending annular surface, an inner axially extending surface and two radially extending side surfaces. The inner axially extending surface has a plurality of magnets aligned to form a rotor. A plurality of coils is supported by the housing and is aligned with the rotor to form a motor/generator. A controller controls the motion of the hub-less flywheel to reduce vibrations and controls electrical power transfer to and from the motor/generator.

Flywheel energy storage device with a hubless ring-shaped rotor

A pad conditioner is provided for conditioning a polishing pad in chemical mechanical planarization (CMP). The pad conditioner comprises a plastic abrasive portion having a first hardness and optionally a brush portion having a second hardness less than the first hardness. The plastic abrasive portion comprises a base plate and a plurality of plastic nodules formed on a surface of the base plate, each of the plastic nodules having a planar top surface, wherein the planar top surface is positioned to substantially contact a polishing pad. The brush portion may be positioned adjacent to the plastic abrasive portion, the brush portion having a plurality of brush elements positioned to substantially contact the pad.

Pad conditioner

One embodiment provides a retaining ring assembly. The retaining ring assembly comprises a retaining ring configured to circumferentially surround and retain the substrate within an inner surface of the retaining ring, and a flexure coupled to the retaining ring. The flexure is configured to maintain a gap between an inner surface of a carrier ring and an outer surface of the retaining ring, and the carrier ring is circumferentially surrounding the retaining ring.

Carrier head using flexure restraints for retaining ring alignment

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Sunnyvale, CA, United States of America

Jin Yi