Shanghai Huali Integrated Circuit Corporation

Aac Acoustic Technologies (shanghai) Co., Ltd.

Jin Xu

Minjie Chen

Yu Ren

Zaifeng Tang

The present application discloses a method for manufacturing shallow trench isolation, comprising: step: performing first time etching on a semiconductor substrate by means of a dry etching process to form the shallow trench, wherein in the first time etching, metal ions are released from a dry etching process chamber and deposited on the inner surface of the shallow trench, and the metal ions diffuse and form a contamination layer; and step: performing second time etching on the semiconductor substrate exposed on the inner surface of the shallow trench by means of a wet etching process to remove the contamination layer on the inner surface of the shallow trench. In the present application, the metal ions released from the dry etching process chamber and deposited on the inner surface of the shallow trench during the dry etching of the shallow trench can be removed.

Method for manufacturing shallow trench isolation

A vibration signal testing method, a vibration signal testing device, a storage medium, and an electronic device are provided. The vibration signal testing method includes: collecting an editing operation of a user, obtaining a first vibration signal according to the editing operation, outputting the first vibration signal to a mobile terminal. The vibration signal testing method further includes determining corresponding test result according to actual vibration effect of the first vibration. By directly using a mobile terminal with vibration function as the output source of vibration signals, the user can experience the actual vibration effect of the designed vibration signal more quickly and conveniently. By combining professional design and production on the desktop with convenient experience on the mobile terminal, vibration signals can flow in both directions, thereby improving the testing efficiency, design efficiency, and design accuracy of vibration signals.

Growing community of inventors

Shanghai, China

Jin Xu