Hyundai Motor Company

Korea Electronics Technology Institute

Samsung Electronics Co., Ltd.

Kia Motors Corporation

Korea Institute of Science and Technology

Dae Wha Alloytech Co., Ltd.

Kia Corporation

Jin Woo Cho

Hyun Mi Kim

Hyeong Keun Kim

Seul Gi Kim

Hong Wook Lee

Myung Rae Cho

Ki Hun Seong

Woo Tae Kim

Ki Taek Kim

Wootae Kim

Tae Hyuck Kim

Won Gyu Kim

Young Chul Ko

Dae Ro Park

Kyung Guen Song

Seung Ho Lee

Jin Ho Lee

Soo Hyung Woo

Ho Joong Lee

Hwa Sun Lee

Jae Hoon Cho

Jong-Jin Lee

Do Sung Hwang

Sung Il Lee

Hye Seung Kim

Seung Kook Han

Ki Seung Baek

Myung Bae Bang

Kyu Beom Ko

Woon Yong Lee

Yoon Jin Kim

Hee Moon Jeong

Kwang Sik Yang

Tae-Sang Park

Seong Woon Booh

Dong Ok Kwak

Min Sig Shin

Kyu Hong Ahn

Hye Young Kim

Eun Deok Bae

Jong Seo Yoon

Hyo Sik Moon

Jin Wook Son

Dea Ki Cheong

Chang Yu Kim

Hyun Min Park

Hong Min Oh

Ji Yeol Park

Hae Seung Lee

Ki-Bum Kim

Jong Hun Han

Kang Woo Cho

Se Yeon Won

Moon Suhk Suh

Han Seung Myoung

Kwang Jin Bae

Ik Jun Choi

Ji Hoon Han

Jun Hyeok Jeon

Yong Kyung Kim

Kyung Taek Jung

Seon-min Kim

Kwon-woo Shin

Dong-Won Ki

Hae Seok Oh

Jin Sol Je

Kyung Min Poo

Byoung Jik Ahn

Ki Pal Kim

Ji Sun Park

Kwon Woo Shin

Jin-sol Je

Myung Gui Choi

This application relates to a pellicle for extreme ultraviolet lithography used in a lithography process using extreme ultraviolet rays. In one aspect, the pellicle includes a pellicle layer formed of an M-α material in which M is combined with α. Here, M is one of Si, Zr, Mo, Ru, Y, W, Ti, Ir, or Nb, and α is at least two of B, N, C, O, or F.

Pellicle for extreme ultraviolet lithography

A pellicle for extreme ultraviolet lithography containing molybdenum carbide is disclosed. The pellicle includes a substrate having an opening formed in a central portion, and a pellicle layer formed on the substrate to cover the opening and including a molybdenum carbide containing layer that contains molybdenum carbide expressed as MoC(0<x<1). The pellicle layer includes a core layer formed on the substrate to cover the opening, and the core layer may be the molybdenum carbide containing layer.

Pellicle for extreme ultraviolet lithography containing molybdenum carbide

This application relates to a pellicle for extreme ultraviolet lithography containing amorphous carbon and a manufacturing method thereof. In one aspect, the pellicle includes a substrate having an opening formed in a central portion, a support layer formed on the substrate to cover the opening, and a pellicle layer formed on the support layer and containing amorphous carbon. The pellicle layer may include a core layer formed on the support layer, and a capping layer formed on the core layer and may further include a buffer layer. At least one of the core layer, the capping layer, or the buffer layer may be an amorphous carbon layer.

Pellicle for extreme ultraviolet lithography containing amorphous carbon and method for manufacturing the same

This application relates to a pellicle for extreme ultraviolet lithography and a manufacturing method thereof using the low-temperature direct growth method of multilayer graphene. In one aspect, the method includes forming an etch stopper on a substrate, forming a seed layer on the etch stopper, the seed layer including at least one of amorphous boron, BN, BCN, BC, or Me-X (Me is at least one of Si, Ti, Mo, or Zr, and X is at least one of B, C, or N). The method may also include forming a metal catalyst layer on the seed layer; forming an amorphous carbon layer on the metal catalyst layer, and directly growing multilayer graphene on the seed layer through interlayer exchange between the metal catalyst layer and the amorphous carbon layer by performing a low-temperature heat treatment at 450° C. to 600° C.

Low-temperature direct growth method of multilayer graphene, pellicle for extreme ultraviolet lithography using the same, and method for manufacturing the pellicle

This application relates to a pellicle for extreme ultraviolet lithography based on yttrium (Y) and used in a lithography process using extreme ultraviolet rays. In one aspect, the pellicle includes a pellicle layer including a core layer formed of an yttrium-based material expressed as Y-M (M is one of B, Si, O, or F).

Pellicle for extreme ultraviolet lithography based on yttrium

A pellicle for extreme ultraviolet (EUV) lithography is based on yttrium carbide and used in a EUV lithography process. The pellicle for EUV lithography includes a pellicle layer that has a core layer containing yttrium carbide. The yttrium carbide is YCin which the atomic percentage of carbon is within a range of 25% to 45%.

Pellicle for extreme ultraviolet lithography based on yttrium carbide

This application relates to a method for manufacturing a pellicle for extreme ultraviolet lithography. In one aspect, the method includes forming a support layer of a silicon nitride material on a silicon substrate, and forming a core layer of a graphene material on the support layer. The method may also include forming a graphene defect healing layer on the core layer by selectively forming a material of MeON(Me is one of Si, Al, Ti, Zr, and Hf, x+y=2) at a grain boundary of the core layer in an atomic layer deposition process using heat in order to heal defects generated in graphene forming the core layer without additional damage to the graphene. The method may further include a capping layer on the graphene defect healing layer, wherein a central portion of the silicon substrate under the support layer is removed to form an opening partially exposing the support layer.

Method for manufacturing pellicle for extreme ultraviolet lithography having graphene defect healing layer

A pellicle for extreme ultraviolet lithography has an extreme ultraviolet transmittance of 90% or more and also has thermal stability, mechanical stability, and chemical durability. The pellicle includes a support layer and a pellicle layer. The support layer has an opening formed in a central portion thereof. The pellicle layer is formed on the support layer to cover the opening and includes ZrB(2&#x3c;x&#x3c;16).

A system for managing a battery of a vehicle includes a first controller configured to control a power-on (IG ON) state and a power-off (IG OFF) state of a plurality of controllers in the vehicle and to be periodically woken up in the power-off (IG OFF) state to wake up at least some of the plurality of controllers, and a second controller configured to turn off a main relay connecting a first battery in the vehicle and a vehicle system when the power-off (IG OFF) state begins, to monitor a state of the first battery storing energy for generating power of the vehicle by maintaining power during a preset first reference time, to be woken up at a wake-up period of the first controller when the first reference time elapses, and to monitor the state of the first battery.

System and method for managing battery of vehicle

A compressor is disclosed. The compressor includes an upper shell and a lower shell forming an appearance of the compressor. The compressor also includes a coupling portion provided between the upper shell and the lower shell and configured to protrude from a side surface of the upper shell or the lower shell to outside the upper shell or the lower shell. The coupling portion includes at least one coupling protrusion configured to protrude from a side surface of a flange portion to the outside, to increase a rigidity of the flange portion and the coupling portion.

Compressor comprising an upper shell and a lower shell wherein the upper shell comprises an upper protrusion comprising a first protrusion and a second protrusion comprising a transition and an approximately flat shape

A battery pre-heating apparatus for a hybrid vehicle according to an embodiment of the present invention comprises: a battery composed of a plurality of battery cells; a power relay assembly comprising, for the charge and discharge control of the battery, a first main relay connected to a positive electrode of the battery and a second main relay connected to a negative electrode of the battery; and a pre-heater including at least one sheet heater formed of a heating paste composition, wire-connected between an output terminal of the first main relay and an output terminal of the second main relay, and pre-heating the battery to a predetermined temperature using generation power by regenerative braking, wherein the heating paste composition contains, on the basis of 100 parts by weight of the heating paste composition, 3-6 parts by weight of carbon nanotube particles, 0.5-30 parts by weight of carbon nanoparticles, 10-30 parts by weight of a mixed binder, 29-83 parts by weight of an organic solvent, and 0.5-5 parts by weight of a dispersant, the mixture binder being a mixture of epoxy acrylate, a polyvinyl acetal, and a phenol-based resin, or a mixture of hexamethylene diisocyanate, a polyvinyl acetal, and a phenol-based resin.

Battery pre-heating apparatus for hybrid vehicle and control method therefor

A cooling system of an engine may include a cylinder liner formed in a hollow cylindrical shape and pressed against an inside of a cylinder of the engine, a block coolant jacket positioned in an outer side of the cylinder liner in a radial direction to cool a cylinder block, the cylinder block provided with the cylinder liner and the block coolant jacket therein, and a cylinder head engaged on the cylinder block, including an exhaust port and an intake port fluidically-communicated with a combustion chamber and respectively formed at an exhaust side and an intake side, and provided with a head coolant jacket inside, in which the block coolant jacket includes an upper coolant jacket and a lower coolant jacket and a division wall is disposed between the upper coolant jacket and the lower coolant jacket to block fluid flow therebetween.

Cooling system of engine

A control method and apparatus of a hybrid vehicle are provided. The control method includes determining whether the speed of a motor exceeds a first threshold value, when supply of power to a battery is cut off and thus the hybrid vehicle is driven by an engine. The speed is then adjusted to be the first threshold value or less, when the speed exceeds the first threshold value.

Control method and apparatus of hybrid electric vehicle

A method of controlling coasting of a vehicle, may include a preparing step of measuring an interval between an objective vehicle and a foregoing vehicle traveling ahead of the objective vehicle. a starting step of calculating a distance moved by coasting for a first predetermined time from a current speed of the objective vehicle and of starting coasting when the calculated movement distance is larger than the interval measured in the preparing step. an ending step of calculating a distance moved by coasting for a second predetermined time from the current speed of the objective vehicle after coasting is started in the starting step, and of giving an instruction to end coasting when the calculated movement is larger than the interval measured in the preparing step, in which the time Tis longer than the time T

Method of controlling coasting of vehicle

A control method for driving of a vehicle for fail-safe, including: determining, by a controller, whether an interface apparatus selecting a shift range fails; confirming, by the controller, the shift range selected upon the failure determination; determining whether the vehicle is in a parking state when the shift range selected upon the failure determination is out of a D range; as a result of performing the determining of the parking, when the vehicle is in the parking state, guiding, by the controller, a driver to step on an accelerator pedal for forward driving of the vehicle; and after the guiding of the driving, when a manipulated quantity of an accelerator pedal is detected, limiting, by the controller, a torque to reduce an output torque value of the vehicle depending on the manipulated quantity of the accelerator pedal for a predetermined reference time.

Control method for driving of vehicle for fail-safe

Growing community of inventors

Seongnam-si, South Korea

Jin Woo Cho