Samsung Electronics Co., Ltd.

Jin-Woo Ahn

Myoung-Ki Ahn

Tae-yong Jo

Byeong-hwan Jeon

Won-Don Joo

Wook-rae Kim

Young-kyu Park

Young Yoo Heo

Hyeong-min Ahn

Jung-Chul Lee

Young-Gwon Kim

Sung-Hwi Cho

Tae-hyoung Lee

Tae-Jun Ahn

A plasma light source apparatus includes a first laser generator configured to generate a first laser. A second laser generator is configured to generate a second laser. A chamber is configured to accommodate and seal a medium material for plasma ignition and to allow plasma to be ignited by the first laser and to be maintained by the second laser. An inner surface of the chamber includes two curved mirrors that face each other.

Plasma light source apparatus and light source system including the same

A panel inspecting apparatus and method may accurately inspect image quality of a curved portion of a panel with relatively small inspecting cost and time, and the panel inspecting apparatus may have a relatively simple structure. The panel inspecting apparatus includes a support on which a panel is disposed, a mirror corresponding to a curved area of the panel, a lens configured to receive an image from the panel and an image reflected by the mirror and focus the images, and an image sensor configured to capture the images transferred via the lens.

Panel inspecting apparatus and method

An optical module for surface inspection includes a first light source unit that illuminates a substrate with first light produced by a first light source and a first beam splitter that changes the path of the first light, a second light source unit that illuminates the substrate with second light polarized in a first direction, a direction of polarization changing unit that illuminates the substrate with the third light polarized in a second direction perpendicular to the first direction, and a detection unit that detects fourth light which is a product of the first light reflecting from the substrate, fifth light which is a product of the second light scattered from the substrate, and sixth light which is a product of the third light scattered from the substrate. The third light is produced by changing the direction of polarization of the second light reflected from the inspected substrate.

Optical module for surface inspection and surface inspection apparatus including the same

Growing community of inventors

Suwon-si, South Korea

Jin-Woo Ahn