Semiconductor Manufacturing International (shanghai) Corporation

Tyco Electronics (shanghai) Co., Ltd.

Shenzhen Ami Technology Co., Ltd

Tyco Electronics (shenzhen) Co. Ltd.

Tyco Electronics Co., Ltd.

Jin Su

Dandan Zhang

Yingcong Deng

Zhi Bin Li

Qinglong Zeng

Yaodong Wu

Roberto Francisco-Yi Lu

Zhao Li

Xiao Qiang

Chin Te Hunag

Li Zi Wang

Zhenliang Chen

Zhi Li

An automatic component loading system is disclosed. The automatic component loading system has a loading device, a conveying device having a plurality of first pin receiving slots and a plurality of first component receiving trays positioned around a circumference of the conveying device, and a position correcting device having at least one pin that corresponds with the plurality of first pin receiving slots.

Automatic component loading system

A method for monitoring a dose of a silicon bearing implant is described. The method includes introducing a first implant species through a surface of a semiconductor substrate at a first does of energy level and introducing a silicon bearing species through the surface of the semiconductor substrate at a second dose and a second energy level. The method anneals the semiconductor substrate and measures a sheet resistance value of the surface of the semiconductor substrate. The method also determines the second dose value based upon the surface resistance value.

Method and system for monitoring implantation of ions into semiconductor substrates

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Shanghai, China

Jin Su